Support posts for micro-mechanical devices

• US 5,497,262 A
• Filed: 06/07/1995
• Issued: 03/05/1996
• Est. Priority Date: 07/29/1994
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Kaeriyama, Toshiyuki
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Schuberg, Darren E.
• Application Number:
  US08/476,961
• Time in Patent Office: 272 Days
• Field of Search: 359/212, 359/213, 359/221, 359/223, 359/224, 359/225, 359/230, 359/245, 359/259, 359/263, 359/267, 359/291, 359/295, 359/318, 359/846, 359/849, 359/850, 359/855, 359/871 , 359/900, 345/33, 345/48, 345/108
• US Class Current: 359/223.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/90 Methods

Abstract

An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the top surface of the spacer layer (34), leaving a sidewall ring (23a) on the inner surface of the via (34a). Next, a metal layer (61) is deposited over the spacer layer (34) and into the via (34a) so as to cover the sidewall ring (23a). This metal layer (61) is then etched to form a support post stem (23) inside the via (34a). The spacer layer (34) is removed, leaving the support post stem (23) and a sidewall ring (23a) around the stem (23).

Claims

1. An improved method of fabricating support posts for a micro-mechanical device, wherein the improvement comprises:

depositing a spacer layer over a substrate;

etching vias into said spacer layer, each via defining the outer surface of a support post;

depositing an oxide layer over said spacer layer and into said vias, such that said oxide layer substantially conformally coats the inside surface of said vias;

etching back said oxide layer to the top surface of said spacer layer, such that a sidewall ring remaining from said oxide layer coats the inside surfaces of each via;

depositing a post metal layer over said spacer layer, such that said post metal layer coats the inside surface of said sidewall rings; and

etching said post metal layer to form said support posts.

2. The method of claim 1, wherein said step of depositing an oxide layer is performed at room temperature.

3. The method of claim 1, wherein said step of depositing an oxide layer is performed at a temperature between room temperature and 120 degrees.

4. The method of claim 1, wherein said step of depositing an oxide layer is performed by depositing oxide by means of a fluorotriethoxysilane source.

5. The method of claim 1, wherein said depositing step is performed by depositing oxide by means of a tetramethyl siloxane (TMDS) source.

6. The method of claim 1, wherein said step of etching back is performed with an anisotropic etch.

7. The method of claim 1, wherein said step of depositing a post metal layer is performed by sputtering.