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Pneumatically driven micro-pump

  • US 5,499,909 A
  • Filed: 11/17/1994
  • Issued: 03/19/1996
  • Est. Priority Date: 11/17/1993
  • Status: Expired due to Fees
First Claim
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1. Pneumatically driven micro-pump comprisingchannel means including a first port, a second port and a flow-through space which provides a communication therebetween;

  • a plurality of diaphragms disposed in an array along the flow-through space in a direction from the first to the second port and each having its front surface exposed to the flow-through space and capable of bulging/retracting with respect to the space;

    diaphragm support means disposed on the opposite side of the diaphragms from the flow-through space and including a plurality of actuating gas spaces which are disposed in opposing relationship with the rear surfaces of the respective diaphragms;

    a plurality of reciprocatory motion means for individually imparting a pneumatic oscillation to the respective actuating gas spaces;

    and drive means for driving each of the reciprocatory motion means for reciprocatory motion with phase differences therebetween such that the reciprocatory motion means which reaches its upper dead center where a high pressure peak is applied to its associated actuating gas space shifts sequentially in a direction from the first to the second port.

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