Sensor for detecting ultra-violet rays
First Claim
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1. A sensor for detecting ultra-violet rays comprising:
- a lower semiconductor substrate having a cavity;
an upper glass substrate;
a photocathode formed on the lower semiconductor substrate;
an anode formed on the upper glass substrate, wherein said lower semiconductor substrate is adhered to the upper glass so that said photocathode and said anode are positioned to face each other across the cavity.
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Abstract
This invention relates to a sensor for detecting ultra-violet rays suitable for mass-production. The sensor for detecting ultra-violet rays includes one that is formed by junction of an upper layer with a lower layer so as to face each other across an air cavity, which lower layer includes a silicon substrate having a cavity, an insulation layer formed on all over the silicon substrate, a photoelectric pole part formed on the insulation layer and a protection layer formed on the photoelectric part, and which upper layer includes a glass substrate having a transmissive characteristic to ultra-violet rays, and an anode part formed on the glass substrate.
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Citations
16 Claims
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1. A sensor for detecting ultra-violet rays comprising:
a lower semiconductor substrate having a cavity;
an upper glass substrate;
a photocathode formed on the lower semiconductor substrate;
an anode formed on the upper glass substrate, wherein said lower semiconductor substrate is adhered to the upper glass so that said photocathode and said anode are positioned to face each other across the cavity.- View Dependent Claims (2)
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3. A sensor for detecting ultra-violet rays comprising:
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an upper layer;
a lower layer adhered to the upper layer so as to face each other across a cavity;
wherein said lower layer includes;a silicon substrate having the cavity; an insulation layer formed on all over the silicon substrate; a photocathode part formed on the insulation layer; and
,a protection layer formed on the photocathode part;
wherein said upper layer includes;a glass substrate having a transmissive characteristic to ultra-violet rays; and
,an anode part formed on the glass substrate. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification