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Method for programming antifuses for reliable programmed links

  • US 5,502,395 A
  • Filed: 05/25/1994
  • Issued: 03/26/1996
  • Est. Priority Date: 05/25/1994
  • Status: Expired due to Term
First Claim
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1. A method of programming selected antifuses in a plurality of antifuses in an integrated circuit, said method comprisingdriving a programming pulse of current through a selected previously unprogrammed antifuse;

  • measuring a resistance through said antifuse after said programming pulse;

    comparing said measured resistance with a predetermined resistance value;

    repeating said driving, measuring and comparing steps until said measured resistance is less than a predetermined resistance value; and

    driving a current at a predetermined voltage through said antifuse for a first predetermined amount of time and ramping down said current in a predetermined manner in a second predetermined amount of time;

    whereby said selected antifuses have low and stable programmed resistances.

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