Method for programming antifuses for reliable programmed links
First Claim
1. A method of programming selected antifuses in a plurality of antifuses in an integrated circuit, said method comprisingdriving a programming pulse of current through a selected previously unprogrammed antifuse;
- measuring a resistance through said antifuse after said programming pulse;
comparing said measured resistance with a predetermined resistance value;
repeating said driving, measuring and comparing steps until said measured resistance is less than a predetermined resistance value; and
driving a current at a predetermined voltage through said antifuse for a first predetermined amount of time and ramping down said current in a predetermined manner in a second predetermined amount of time;
whereby said selected antifuses have low and stable programmed resistances.
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Accused Products
Abstract
A method for programming antifuses is described. Programming current pulses are driven through a selected antifuse. The resistance through the antifuse is then measured and compared to a predetermined resistance value. These measuring, comparing and driving steps are repeated until the measured resistance is less than a predetermined resistance value and the antifuse is annealed by driving a predetermined amount of current through the antifuse for a first predetermined amount of time and ramping down the current in a predetermined manner in a second predetermined amount of time. With this programming method no complex methods and circuits to reverse the polarities of voltage across and currents through the antifuse are required.
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Citations
9 Claims
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1. A method of programming selected antifuses in a plurality of antifuses in an integrated circuit, said method comprising
driving a programming pulse of current through a selected previously unprogrammed antifuse; -
measuring a resistance through said antifuse after said programming pulse; comparing said measured resistance with a predetermined resistance value; repeating said driving, measuring and comparing steps until said measured resistance is less than a predetermined resistance value; and driving a current at a predetermined voltage through said antifuse for a first predetermined amount of time and ramping down said current in a predetermined manner in a second predetermined amount of time; whereby said selected antifuses have low and stable programmed resistances. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification