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Doppler velocimeter and position information detection apparatus for use with objects having variations in surface depth

  • US 5,502,466 A
  • Filed: 06/28/1994
  • Issued: 03/26/1996
  • Est. Priority Date: 06/29/1993
  • Status: Expired due to Fees
First Claim
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1. A position information detection apparatus comprising:

  • a first detection system for radiating two collimated light beams onto an object to be measured at a crossing angle to form interference fringes at a predetermined interval, said first detection system detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval;

    a second detection system for radiating two light beams onto the object to be measured at a crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, said second detection system detecting scattered light emanating from the object to be measured by the interference fringes having the gradient; and

    detection means for comparing output signals from said first and second detection systems, and detecting relative position information of the object to be measured, along an opposing direction of said first and second detection systems to the object to be measured.

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