Doppler velocimeter and position information detection apparatus for use with objects having variations in surface depth

• US 5,502,466 A
• Filed: 06/28/1994
• Issued: 03/26/1996
• Est. Priority Date: 06/29/1993
• Status: Expired due to Fees

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Kato, Shigeki, Takamiya, Makoto, Ueda, Shinji, Ishida, Yasuhiko, Ashiwa, Jun, Kadowaki, Hidejiro
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): KIM, ROBERT H
• Application Number:
  US08/266,740
• Time in Patent Office: 637 Days
• Field of Search: 356/35.5, 356/28, 356/28.5, 356/345, 356/349, 356/356
• US Class Current: 356/499
• CPC Class Codes: G01P 3/366 by using diffraction of light for measuring speed of fluids G01P5/26
• CPC Class Codes: G01P 5/26 by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
• CPC Class Codes: G01S 17/06 Systems determining position data of a target
• CPC Class Codes: G01S 17/58 Velocity or trajectory determination systems; Sense-of-movement determination systems

Abstract

A position information detection apparatus includes a first detection system for radiating two collimated light beams onto an object to be measured at a predetermined crossing angle to form interference fringes at a predetermined interval, and detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval, a second detection system for radiating two light beams onto the object to be measured at a predetermined crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, and detecting scattered light emanating from the object to be measured by the interference fringes having the gradient, and a detection unit for comparing output signals from the first and second detection systems, and detecting relative position information, along the opposing direction of the first and second detection systems, of the object to be measured.

Claims

1. A position information detection apparatus comprising:

a first detection system for radiating two collimated light beams onto an object to be measured at a crossing angle to form interference fringes at a predetermined interval, said first detection system detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval;

a second detection system for radiating two light beams onto the object to be measured at a crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, said second detection system detecting scattered light emanating from the object to be measured by the interference fringes having the gradient; and

detection means for comparing output signals from said first and second detection systems, and detecting relative position information of the object to be measured, along an opposing direction of said first and second detection systems to the object to be measured.

2. An apparatus according to claim 1, wherein said first and second detection systems split a light beam from a common light source to form two pairs of light beams which cross at different positions.

3. An apparatus according to claim 1, further comprising interval control means for controlling an interval between said first and second detection systems and the object to be measured on the basis of a detection result from said detection means.

4. An apparatus according to claim 1, further comprising crossing position control means for changing a relationship between the detection system and the crossing position of the two beams in each of said first and second detection systems on the basis of a detection result from said detection means.

5. An apparatus according to claim 1, wherein said first and second detection systems respectively have light sources having different output light wavelengths, and each guide two light beams formed from a light beam emitted from the corresponding light source to cross each other.

6. An apparatus according to claim 5, wherein said first and second detection systems guide the light beams from the corresponding light sources to the object to be measured via a common optical system.

7. An apparatus according to claim 1, wherein said first and second detection systems each guide the two light beams to cross at substantially the same position on the object to be measured.

8. A velocimeter comprising:

a first detection system for radiating two collimated light beams onto an object to be measured at a crossing angle to form interference fringes at a predetermined interval, said first detection system detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval;

velocity information detection means for detecting moving velocity information relative to the object to be measured on the basis of an output signal from said first detection system;

a second detection system for radiating two light beams onto the object to be measured at a crossing angle to form interference fringes having a gradient with each other in an opposing direction to the object to be measured, said second detection system detecting scattered light emanating from the object to be measured by the interference fringes having the gradient; and

relative position information detection means for comparing output signals from said first and second detection systems, and detecting relative position information of the object to be measured, along an opposing direction of said first and second detection systems to the object to be measured.

9. A velocimeter according to claim 8, wherein said relative position information detection means detects a distance to the object to be measured along the opposing direction.

10. A velocimeter according to claim 8, wherein said relative position information detection means detects whether or not the object to be measured is present at a proper position in the opposing direction.

11. A velocimeter according to claim 8, wherein said first and second detection systems split a light beam from a common light source to form two pairs of light beams which cross at different positions.

12. A velocimeter according to claim 8, further comprising interval control means for controlling an interval between said first and second detection systems and the object to be measured on the basis of a detection result from said relative position information detection means.

13. A velocimeter according to claim 8, further comprising crossing position control means for changing a relationship between the detection system and the crossing position of the two beams in each of said first and second detection systems on the basis of a detection result from said relative position information detection means.

14. A velocimeter according to claim 8, wherein said first and second detection systems respectively have light sources having different output light wavelengths, and each guide two light beams formed from a light beams emitted from the corresponding light source to cross each other.

15. A velocimeter according to claim 14, wherein said first and second detection systems guide the light beams from the corresponding light sources to the object to be measured via a common optical system.

16. A velocimeter according to claim 8, wherein said first and second detection systems each guide the two light beams to cross at substantially the same position on the object to be measured.

17. A position information detection apparatus comprising:

a first detection system for radiating two collimated light beams onto an object to be measured at a crossing angle to form interference fringes at a predetermined interval, said first detection system detecting scattered light emanating from the object to be measured by the interference fringes at the predetermined interval;

a second detection system for radiating two light beams onto the object to be measured at a crossing angle to form interference fringes having a gradient with each other, said second detection system detecting scattered light emanating from the object to be measured by the interference fringes having the gradient; and

signal processing unit for comparing output signals from said first and second detection system, and detecting relative position information of the object to be measured, along a direction differing from a direction of arrangement of the interference fringes at the predetermined interval.

18. An apparatus according to claim 17, wherein said second detection system radiates said two light beams to form interference fringes having a gradient with each other in an opposing direction thereof to the object to be measured.

19. An apparatus according to claim 17, further comprising means for detecting velocity information of the object to be measured along the direction of arrangement of the interference fringes at the predetermined interval on the basis of the output signal from said detection system.