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Tunnel current sensor with force relief protection

  • US 5,503,018 A
  • Filed: 12/08/1992
  • Issued: 04/02/1996
  • Est. Priority Date: 12/08/1992
  • Status: Expired due to Fees
First Claim
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1. A tunnel current sensor for sensing the position of a first object with respect to a second object, comprising:

  • a compliant beam having a first end affixed to the first object and a second end distal said first end, said first and second objects being in spaced relation;

    an electron emission electrode disposed on said compliant beam;

    a positive electrode disposed on the second object;

    said electron emission and positive electrodes being displaced toward each other to position the first and second objects upon an electrical potential being applied across said electrodes; and

    said compliant beam being effective as force relief means, whereby bending of said beam in response to external forces caused by overloading conditions on said sensor relieves said external forces for preventing damage to said electrodes due to electrode crashing.

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