Ultra-thin film laminate

• US 5,503,912 A
• Filed: 10/12/1993
• Issued: 04/02/1996
• Est. Priority Date: 10/12/1992
• Status: Expired due to Term

• Current Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Original Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Inventors: Tanaka, Motoyuki, Nakayama, Akira, Yoshioka, Takashi, Setoyama, Makoto, Kobayashi, Mitsunori, Yamagata, Kazuo, Hashimoto, Yasuhisa
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/134,692
• Time in Patent Office: 903 Days
• Field of Search: 428/698, 428/699, 428/697, 428/212, 428/216, 428/704
• US Class Current: 428/216
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C04B 2111/00189 Compositions or ingredients of the compositions characterised by analysis-spectra, e.g. NMR
• CPC Class Codes: C04B 2111/00353 Sliding parts
• CPC Class Codes: C04B 2111/00405 Materials with a gradually increasing or decreasing concentration of ingredients or property from one layer to another
• CPC Class Codes: C04B 2111/00844 for electronic applications
• CPC Class Codes: C04B 35/00 Shaped ceramic products characterised by their composition porous ceramic products C04B38/00; ceramic articles characterised by particular shape, see the relevant classes, e.g. linings for casting ladles, tundishes, cups or the like B22D41/02; ceramic substrates for microelectronic semi-conductors H01L23/15; Ceramics compositions containing free metal bonded to carbides, diamond, oxides, borides, nitrides, silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides or sulfides other than as macroscopic reinforcing agents C22C; shaping of ceramics B28B; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products chemical preparation of powders of inorganic compounds C01; infiltration of sintered ceramic preforms with molten metal C04B41/51
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/4529 applied from the gas phase
• CPC Class Codes: C04B 41/5062 Borides, Nitrides or Silicides
• CPC Class Codes: C04B 41/5063 Aluminium nitride
• CPC Class Codes: C04B 41/5068 Titanium nitride
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C04B 41/524 Multiple coatings, comprising a coating layer of the same material as a previous coating layer
• CPC Class Codes: C04B 41/87 Ceramics
• CPC Class Codes: C04B 41/89 for obtaining at least two superposed coatings having different compositions
• CPC Class Codes: C23C 14/0641 Nitrides C23C14/0617 takes precedence
• CPC Class Codes: C23C 14/0664 Carbonitrides
• CPC Class Codes: Y10T 428/24942 including components having same physical characteristic in differing degree
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick

Abstract

A coating film which can sufficiently improve the wear resistance of a cutting tool or a wear-resistant tool and which reveals excellent qualities as a wear-resistant or protective film for an electric or electronic part or a sliding or machine part. Such a coating film is in the form of an ultra-thin film laminate comprising at least one nitride or carbonitride of at least one element selected from the group consisting of the elements in the groups IVa, Va and VIa in the periodic table and Al and B and having a cubic crystal structure and having mainly metallic bonding properties, and at least one compound having a crystal structure other than the cubic crystal structure at normal temperature and normal pressure and under equilibrium state and having mainly covalent bonding properties, the at least one nitride or carbonitride and the compound being alternately laminated in the form of layers, each layer of the compound having a thickness of 0.2-50 nm, the laminate having a cubic crystalline X-ray diffraction pattern as a whole.

Claims

1. An ultra-thin film laminate comprising

at least one nitride or carbonitride of at least one element selected from the group consisting of the elements in groups IVa, Va and VIa in the periodic table and Al and B, said nitride or carbonitride having a cubic crystal structure and having mainly metallic bonding properties, and

at least one compound having a crystal structure other than a cubic crystal structure at normal temperature and normal pressure and under an equilibrium state and having mainly covalent bonding properties,

said at least one nitride or carbonitride and said at least one compound being alternately laminated in the form of layers in which the compositions of the adjacent layers change continuously and wherein each layer of said nitride or carbonitride and said compound have a thickness of 0.2-20 nm, said laminate having a cubic crystalline X-ray diffraction pattern as a whole.

2. An ultra-thin film laminate comprising

at least one nitride or carbonitride of at least one element selected from the group consisting of the elements in groups IVa, Va and VIa in the periodic table and Al, said nitride or carbonitride having a cubic crystal structure and having mainly metallic bonding properties, and

at least one nitride containing Al and/or B as main components and having a crystal structure other than a cubic crystal structure at normal temperature and normal pressure and under an equilibrium state and having mainly covalent bonding properties,

said at least one nitride or carbonitride and said at least one nitride being alternately laminated in the form of layers in which the compositions of the adjacent layers change continuously and each layer of said nitride or carbonitride and said compound have a thickness of 0.2-20 nm, said laminate having a cubic crystalline X-ray diffraction pattern as a whole.