Void detection in metallization patterns

• US 5,504,017 A
• Filed: 12/20/1994
• Issued: 04/02/1996
• Est. Priority Date: 12/20/1994
• Status: Expired due to Fees

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Yue, John T., Pramanick, Shekhar
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Radomsky, Leon
• Application Number:
  US08/359,464
• Time in Patent Office: 469 Days
• Field of Search: 374/4, 374/5, 324/765, 324/766, 324/538, 437/170, 437/171, 437/8, 437/957
• US Class Current: 374/5
• CPC Class Codes: G01N 25/72 Investigating presence of flaws

Abstract

Voids in a metallization pattern comprising a barrier layer, such as those generated by stress migration, are detected by applying a current across a test section of the metallization pattern to generate hot spots which are detected as by employing an infrared microscope or with a liquid crystalline material.

Claims

1. A method of detecting voids in a metallization pattern of a semiconductor device, which metallization pattern contains an interconnection line and a barrier layer and voids are detected in the interconnection line by measuring hot spots in the barrier layer, comprising:

applying a current across a test section of the metallization pattern, whereby hot spots in the barrier layer cause an elevation in temperature in regions on the surface of the metallization pattern in the vicinity of the voids; and

detecting the areas of elevated temperature.

2. The method according to claim 1, wherein the barrier layer comprises a material selected from the group consisting of titanium, tungsten, tantalum, alloys thereof, nitrides thereof and mixtures thereof.

3. The method according to claim 1, wherein the regions of elevated temperature are detected with an infrared microscope.

4. The method according to claim 3, wherein the regions of elevated temperature are detected by scanning the test section with an infrared microscope.

5. The method according to claim 4, wherein the infrared microscope is mounted to enable automated detection of areas of elevated temperature.

6. The method according to claim 1, wherein the regions of elevated temperature are detected by applying a liquid crystalline material to the surface of the test section and observing a colorimetric change in the liquid crystalline material.

7. The method according to claim 6, wherein the liquid crystalline material is a nematic liquid crystalline material.

8. The method according to claim 6, wherein the liquid crystalline material is a cholesteric crystalline material.

9. The method according to claim 1, wherein the voids are generated by stress migration.

10. The method according to claim 1, wherein the voids are generated by electromigration.

11. The method according to claim 1, wherein the voids are generated by a processing technique.

12. The method according to claim 11, wherein the voids are generated by etching.

13. The method according to claim 1, wherein the voids are about 0.1 micron to about 10 microns or greater.

14. The method according to claim 1, wherein the interconnection line comprises a material having a relatively low electrical resistivity and the barrier layer comprises a material having a relatively high electrical resistivity, and wherein the voids are located in the low electrical resistivity material.

15. The method according to claim 14, wherein the low electrical resistivity material comprises a metal selected from the group consisting of aluminum, copper, and alloys thereof, and the high electrical resistivity material comprises a material selected from the group consisting of titanium, tungsten, alloys thereof, nitrides thereof and mixtures thereof.

16. The method according to claim 15, wherein the low electrical resistivity material comprises aluminum or an alloy thereof, and the high electrical resistivity material comprises titanium, an alloy thereof or a nitride thereof.

17. The method according to claim 14, wherein the low electrical resistivity metal has an electrical resistivity of about 0.5×

10^-6 to about 10×

10^-6 ohm cm, and the high electrical resistivity material has an electrical resistivity of about 50×

10^-6 to about 500×

10^-6 ohm cm.

18. The method according to claim 14, wherein the low electrical resistivity material comprises at least about 75% of the thickness of the metallization pattern.

19. The method according to claim 1, wherein the barrier layer comprises a plurality of layers.

20. The method according to claim 1, wherein the barrier layer is formed at the bottommost part of the metallization pattern.

21. The method according to claim 20, wherein a barrier layer is also formed at the uppermost part of the metallization pattern.

22. The method according to claim 20, wherein a barrier layer is also formed within the metallization pattern.

23. The method according to claim 1, wherein the current density is about 0.1×

10⁶ to about 2×

10⁶ amperes/cm².

24. The method according to claim 23, wherein the current density is about 0.5×

10⁶ to about 100×

10⁶ amperes/cm².

25. The method according to claim 24, wherein the current density is about 0.75×

10⁶ to about 30×

10⁶ amperes/cm².

26. The method according to claim 25, wherein the current density is about 1×

10⁶ to about 20×

10⁶ amperes/cm².

27. The method according to claim 1, wherein the voids are in the surface of the metallization pattern.

28. The method according to claim 1, wherein the voids are internal voids.

29. The method according to claim 22, wherein the barrier layer is formed in the central part of the metallization pattern.

30. The method according to claim 16, wherein the high electrical resistivity material comprises titanium nitride.

31. The method according to claim 14, wherein the low electrical resistivity metal has an electrical resistivity of about 0.5×

10^-6 to about 15×

10^-6 ohm cm, and the high electrical resistivity material has an electrical resistivity of about 20×

10^-6 to about 500×

10^-6 ohm cm.

32. The method according to claim 14, wherein the low electrical resistivity metal has an electrical resistivity of about 0.5×

10^-6 to about 10×

10^-6 ohm cm.

33. The method according to claim 32, wherein the high electrical resistivity material has an electrical resistivity of about 50×

10^-6 to about 500×

10^-6 ohm cm.