Dual beam sensor and edge detection system and method

• US 5,504,345 A
• Filed: 04/14/1994
• Issued: 04/02/1996
• Est. Priority Date: 04/14/1994
• Status: Expired due to Term

• Current Assignee: CyberOptics Semiconductor, Inc. (Nordson Corporation)
• Original Assignee: Hama Laboratories, Inc. (Nordson Corporation)
• Inventors: Cerny, Mark, Bartunek, Hans
• Primary Examiner(s): Allen, Stephone B.
• Application Number:
  US08/227,736
• Time in Patent Office: 719 Days
• Field of Search: 250/221, 250/222.1, 250/223 R, 250/559.33, 250/559.36, 250/559.40, 250/578.1, 356/375, 340/674, 414/936-938, 414/222, 414/331, 414/274
• US Class Current: 250/559.4
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 414/136 including wafer orienting means

Abstract

A semiconductor wafer and magnetic disk edge detection system having a sensor unit comprising a dual beam light source spatially oriented so that the beams focus and converge at a single point external to the sensor unit, and dual light detectors spatially oriented to allow detection of light reflected from the edges of the wafers and disks even where the angle of incidence of the light onto the edge deviates significantly from the perpendicular. The sensor unit works in operative combination with a scanning motion means to move the sensor across the edges of the wafers or disks to be detected, typically by attachment of the sensor unit to a linear motor or a robotic arm, or alternately, by manually detecting the edges of the wafers and disks.

Claims

1. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes, comprising:

a first light source and associated optical elements defining a first optical axis and focusing a first light beam from said first light source to a predetermined point along said first optical axis;

a second light source and associated optical elements defining a second optical axis intersecting said first optical axis at said predetermined point and focusing a second light beam from said second source at said predetermined point, said first and second optical axes defining an inspection plane parallel to said parallel planes;

means for causing relative movement between said disks and said first and second light sources in a direction normal to said inspection plane;

light detector means for detecting light reflected from an edge of one of said disk-shaped objects as the disk and said first and second light sources are moved relative to each other such that the edge moves through said inspection plane and is intersected by at least one of said first and second light beams, and for generating a signal corresponding thereto said signal resulting from the digital processing of the detected reflected light; and

a position encoding means for providing position information of the detected objects to the edge detection system.

2. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as recited in claim 1 wherein said light detecting means includes a first light sensor disposed proximate to said first light source for receiving light from either said first light source or said second light source reflected from an edge of said disk-shaped object, and a second light sensor disposed proximate to said second light source for receiving light from either said second light source or said first light source reflected from an edge of said disk-shaped object.

3. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as in claim 1 wherein said movement means is selected from the group consisting of a robotic arm, a linear motor, a conveyor belt, a disk indexing system, by hand and combinations thereof.

4. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as in claim 1 wherein said signal is processed by a data processing means, in cooperation with said position encoding means, for providing proximity and positional information.

5. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as in claim 4 wherein said positional encoding means is an optical encoder.

6. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as in claim 2 wherein said first light source and said second light source are modulated to reject ambient light and to provide improved parts detection sensitivity as compared to a non-modulated light source.

7. An edge detection system for detecting the presence and position of disk-shaped objects intended to lie within parallel planes as in claim 6 wherein said first light source and said second light source are lasers.

8. A method for detecting the presence and position of the edge of disk-shaped objects intended to lie within parallel planes, comprising the steps of:

providing a sensor unit having at least one light source and associated optics to provide at least two optical axes spatially oriented so that the beams focus and converge at a single point external to the sensor unit and define an inspection plane, and at least one light detector spatially oriented to allow detection of light reflected from an edge of a disk-shaped object;

positioning a carrier containing said disk-shaped objects so that an edge of a disk-shaped object may be detected by said sensor unit if the edge of said disk-shaped object lies within said inspection plane;

moving said sensor unit or said carrier relative to the other so that the edges of said disk-shaped objects are passed through said inspection plane of said sensor unit;

detecting light reflected from the edge of said disk-shaped object as it is passed through the inspection plane of said sensor unit; and

generating a signal for determining proximity and position of said wafer or disk.

9. An optical detection system for detecting the presence of compoundly curved specular surfaces, comprising:

a first light source and associated optical elements defining a first optical axis and focusing a first light beam from said first light source to a predetermined point along said first optical axis;

a second light source and associated optical elements defining a second optical axis intersecting said first optical axis at said predetermined point and focusing a second light beam from said second source at said predetermined point, said first and second optical axes defining an inspection plane parallel to said parallel planes;

means for causing relative movement between the specular surface and said first and second light sources in a direction normal to said inspection plane; and

light detector means for detecting light reflected from the specular surface as the specular surface and said first and second light sources are moved relative to each other such that the specular surface moves through said inspection plane and is intersected by at least one of said first and second light beams, and for generating a signal corresponding thereto.

10. An optical detection system for detecting the presence of compoundly curved specular surfaces as in claim 9 wherein said light detecting means includes a first light sensor disposed proximate to said first light source for receiving light from either said first light source or said second light source reflected from a specular surface, and a second light sensor disposed proximate to said second light source for receiving light from either said second light source or said first light source reflected from a specular surface.

11. An optical detection system for detecting the presence of compoundly curved specular surfaces as in claim 10 wherein said movement means is selected from the group consisting of a robotic arm, a linear motor, a conveyor belt, a mechanical gravity fed conveyor system, a disk indexing system, by hand and combinations thereof.

12. An optical detection system for detecting the presence of compoundly curved specular surfaces as in claim 11 wherein said signal is processed by a data processing means for providing inventory and throughput information.