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Method for fabricating a DMD spatial light modulator with a hardened hinge

  • US 5,504,614 A
  • Filed: 01/31/1995
  • Issued: 04/02/1996
  • Est. Priority Date: 01/31/1995
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a spatial light modulator, comprising the steps of:

  • a) defining address circuitry on a substrate;

    b) defining a hinge support structure on said substrate;

    c) depositing a hinge layer material on said hinge support structure;

    d) ion implanting said hinge layer material with a first material;

    e) defining a hinge from said ion implanted hinge layer material; and

    f) defining a picture element on said hinge which is deflectable in two directions over said address circuitry.

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