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Micromechanical structure with textured surface and method for making same

  • US 5,510,156 A
  • Filed: 08/23/1994
  • Issued: 04/23/1996
  • Est. Priority Date: 08/23/1994
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a suspended microstructure comprising the steps of:

  • (1) depositing a sacrificial layer on a substrate, said layer having a top surface,(2) depositing a mono-layer of particles of a first size on said surface of said sacrificial layer,(3) shrinking said particles to a second size smaller than said first size,(4) depositing a layer of mask material over said sacrificial layer and said particles,(5) removing said particles such that portions of said mask material overlying said particles are removed while portions not overlying said particles remain on said surface,(6) etching said sacrificial layer using said mask material as an etch mask so as to form hollows in said surface of said sacrificial layer,(7) removing said mask material,(8) removing portions of said sacrificial layer to form holes in said sacrificial layer for formation of anchors for said microstructure;

    (9) depositing a microstructure material over said substrate and said sacrificial layer to form said microstructure, said microstructure material filling the holes in said sacrificial layer to form said anchors, and(10) removing said sacrificial layer,a surface of said microstructure material that was in contact with the top surface of said sacrificial layer before removal of said sacrificial layer having bumps corresponding to said hollows, wherein a dimension of said bumps is defined by the second size of said particles and a spacing between said bumps is defined by the first size of said particles.

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