Multiple layer thin films with improved corrosion resistance
First Claim
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1. In a coating having a 10 to 3000 Å
- thick layer of metal selected from the group consisting of silver, copper, and combinations of silver and copper with one another and with noble metals with an overlayer of dielectric, the improvement comprising employing as the overlayer a mixed material having a first layer adjacent to the layer of metal composed substantially of dielectric selected from the group consisting of indium oxide, zinc oxide and mixed indium/zinc oxide dielectric and a second layer adjacent to the first and composed substantially of mixed indium/tin oxide dielectric.
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Abstract
The durability of thin metal coatings and particularly substantially transparent copper and silver plus noble metal coatings and their ability to withstand corrosive environments is improved by overcoating the metal layers with a double coating of dielectric. The first coating is made up of dielectric based on indium and/or zinc. The second coating is made up of dielectric based on indium and tin. These overcoatings are more effective than a single coating based on one metal or a single coating based upon the two metals.
137 Citations
17 Claims
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1. In a coating having a 10 to 3000 Å
- thick layer of metal selected from the group consisting of silver, copper, and combinations of silver and copper with one another and with noble metals with an overlayer of dielectric, the improvement comprising employing as the overlayer a mixed material having a first layer adjacent to the layer of metal composed substantially of dielectric selected from the group consisting of indium oxide, zinc oxide and mixed indium/zinc oxide dielectric and a second layer adjacent to the first and composed substantially of mixed indium/tin oxide dielectric.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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