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Acceleration sensor

  • US 5,511,421 A
  • Filed: 07/08/1993
  • Issued: 04/30/1996
  • Est. Priority Date: 07/08/1992
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor having a semiconductor substrate, comprising:

  • a bridge structure formed on said semiconductor substrate, said bridge structure including;

    a weight having a predetermined mass; and

    a direction regulating member for regulating the direction of deflection of said weight which is produced when an acceleration is applied thereto, to a predetermined direction which is approximately parallel to a surface of said semiconductor substrate; and

    a plurality of metal-insulator-semiconductor type elements which are formed in said semiconductor substrate in the direction of deflection of said weight, an output of each of said metal-insulator-semiconductor type elements being controlled by the deflection of said weight.

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