Method of making an electrolyte for an electrochemical cell

• US 5,512,147 A
• Filed: 05/25/1994
• Issued: 04/30/1996
• Est. Priority Date: 07/29/1992
• Status: Expired due to Term

• Current Assignee: Martin Marietta Energy Systems, Inc. (Martin Marietta Corporation)
• Original Assignee: Martin Marietta Energy Systems, Inc. (Martin Marietta Corporation)
• Inventors: Dudney, Nancy J., Bates, John B.
• Primary Examiner(s): NGUYEN, NAM X
• Application Number:
  US08/248,892
• Time in Patent Office: 706 Days
• Field of Search: 204/192.12, 204/192.15, 429/193
• US Class Current: 204/192.15
• CPC Class Codes: H01L 23/58 Structural electrical arrangements for semiconductor devices not otherwise provided for , e.g. in combination with batteries H01L23/49593, H01L23/49596 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/12044 OLED
• CPC Class Codes: H01M 50/209 adapted for prismatic or rectangular cells H01M50/216 takes precedence
• CPC Class Codes: H01M 6/18 with solid electrolyte
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49108 Electric battery cell making
• CPC Class Codes: Y10T 29/49115 including coating or impregnating

Abstract

Described is a thin-film battery, especially a thin-film microbattery, and a method for making same having application as a backup or primary integrated power source for electronic devices. The battery includes a novel electrolyte which is electrochemically stable and does not react with the lithium anode and a novel vanadium oxide cathode Configured as a microbattery, the battery can be fabricated directly onto a semiconductor chip, onto the semiconductor die or onto any portion of the chip carrier. The battery can be fabricated to any specified size or shape to meet the requirements of a particular application. The battery is fabricated of solid state materials and is capable of operation between -15° C. and 150° C.

Claims

1. A method for making an amorphous electrolyte for an electrochemical cell comprising the steps of:

a) selecting a sputtering apparatus chosen from the group consisting of rf magnetron sputterers and diode sputterers for deposition of thin films;

b) selecting a lithium orthophosphate target material for sputtering in said sputtering apparatus;

c) selecting a pure Nitrogen process gas for operation in said sputtering apparatus;

d) operating said sputtering apparatus at a total gas pressure of 20 milliTorr and a total gas flow rate of at least 14 sccm; and

e) depositing said electrolyte at an average rate of 8 Angstroms per minute.