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Method of making an electrolyte for an electrochemical cell

  • US 5,512,147 A
  • Filed: 05/25/1994
  • Issued: 04/30/1996
  • Est. Priority Date: 07/29/1992
  • Status: Expired due to Term
First Claim
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1. A method for making an amorphous electrolyte for an electrochemical cell comprising the steps of:

  • a) selecting a sputtering apparatus chosen from the group consisting of rf magnetron sputterers and diode sputterers for deposition of thin films;

    b) selecting a lithium orthophosphate target material for sputtering in said sputtering apparatus;

    c) selecting a pure Nitrogen process gas for operation in said sputtering apparatus;

    d) operating said sputtering apparatus at a total gas pressure of 20 milliTorr and a total gas flow rate of at least 14 sccm; and

    e) depositing said electrolyte at an average rate of 8 Angstroms per minute.

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