Process for preparation of stabilized oxide thin layers

• US 5,512,152 A
• Filed: 07/15/1994
• Issued: 04/30/1996
• Est. Priority Date: 07/15/1993
• Status: Expired due to Term

• Current Assignee: Saint Gobain Vitrage (Compagnie De Saint-Gobain S.A.)
• Original Assignee: Saint Gobain Vitrage (Compagnie De Saint-Gobain S.A.)
• Inventors: Gregorowius, Werner, Januschkewitz, Klaus, Schicht, Heinz, Schindler, Herbert, Kaiser, Wilfried
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): McDonald, Rodney G.
• Application Number:
  US08/275,520
• Time in Patent Office: 655 Days
• Field of Search: 204/192.15, 204/192.22, 204/192.23, 204/192.25, 204/192.26, 204/192.27, 204/192.28, 204/192.29, 204/192.16, 427/532, 427/542, 427/553, 427/557, 427/595, 427/126.2, 427/126.3, 427/165, 427/166, 427/167, 427/160
• US Class Current: 204/192.26
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 17/2453 Coating containing SnO2
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/366 Low-emissivity or solar control coatings
• CPC Class Codes: C03C 2217/211 SnO2
• CPC Class Codes: C03C 2217/229 Non-specific enumeration
• CPC Class Codes: C03C 2217/242 with rare earth metals
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C03C 2218/32 After-treatment
• CPC Class Codes: C23C 14/086 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 14/58 After-treatment
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: C23C 14/584 Non-reactive treatment

Abstract

A method for improving the quality of a system of layers deposited on a substrate such as glass is provided, in which, the system of layers have an oxide-based surface layer, in particular n-type semi-conductor oxides such as SnO_x, in which the surface layer is subjected to IR irradiation to provide a stabilization of the layer equivalent to or better than with a 48-hour exposure to the air.

Claims

1. A process for preparing a stabilized layer-coated substrate, which comprises:

a) depositing a metallic oxide surface layer onto a surface of a substrate by vacuum deposition; and

b) irradiating said metallic oxide surface layer with infrared radiation, wherein said irradiation is effected using a wavelength and for a duration sufficient to impart an intensity of 1 kW/m² to 90 kW/m² thereto, and wherein said substrate is maintained at a temperature which does not exceed about 100°

C.

2. The process of claim 1, wherein said infrared radiation has a wave length of from 1.5 μ

m to 5.0 μ

m.

3. The process of claim 1, wherein said irradiating step is performed immediately upon conclusion of said depositing step.

4. The process of claim 1, wherein said irradiating step has a duration of from 10 seconds to 5 minutes.

5. The process of claim 1, wherein said metallic oxide surface layer is SnO_x, or an n-type semi-conductor oxide selected from the group consisting of silicon oxide, aluminum oxide, magnesium oxide, zirconium oxide, niobium oxide, zinc oxide, tantalum oxide and titanium oxide.

6. The process according to claim 2, wherein said infrared radiation has a maximum wavelength of approximately 2.5 μ

m.

7. The process of claim 1, wherein said substrate is float glass.

8. The process of claim 1, wherein said depositing step is performed by cathodic sputtering.

9. The process of claim 1, wherein said substrate is maintained at a temperature in the range of about 38°

-85°

C.

10. The process of claim 1, wherein said deposited metallic oxide surface layer is tin oxide.