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Apparatus for and method of compensating for positioning error

  • US 5,513,114 A
  • Filed: 08/17/1993
  • Issued: 04/30/1996
  • Est. Priority Date: 08/19/1992
  • Status: Expired due to Term
First Claim
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1. A servo control apparatus comprising:

  • a rotatable motor;

    a workpiece position detection means for detecting a position of said workpiece;

    a ballscrew rotating with a rotation of said motor;

    a table, coupled to said ballscrew and supporting a workpiece, moving in a table travel direction in response to the rotation of said ballscrew;

    table position detecting means for detecting a position of said table;

    position command means for outputting a position command signal for specifying the position of said table;

    travel direction reversing timing signal generating means for generating a travel direction reversing timing signal indicating a reversal of travel direction of said table;

    machine deformation error storage means for storing a machine deformation error indicated by the magnitude of a change in difference between the position of said workpiece and the position of said table as detected by said table position detecting means at the reversal of said table travel direction;

    position command compensating means for combining said machine deformation error stored in said machine deformation error storage means with said position command signal from a point of time based on said travel direction reversing timing signal to compensate said position command signal;

    motor driving means for rotating said motor so that the detection output of said table position detecting means matches the output of said position command compensating means; and

    first change slowing means for receiving the machine deformation error stored in the machine deformation error storage means and outputting to said position compensating means, a signal based on said received machine deformation error that rises slowly with time.

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