Method for manufacturing a probe
First Claim
1. A method for manufacturing a probe, comprising the steps of:
- providing a support structure having a first surface and at least one contact pad;
forming a first layer of resist over the first surface and the at least one contact pad;
forming at least one opening through the first layer of resist, the at least one opening having a longitudinal axis that makes an acute angle with the first surface;
filling the at least one opening with a conductive material; and
removing at least a portion of the first layer of resist adjacent the conductive material, wherein the conductive material serves as the probe.
4 Assignments
0 Petitions
Accused Products
Abstract
A probe card (40, 55) having probe card probes (36, 56) and a method for fabricating the probe card probes (36, 56). A layer of resist (23) is formed on a plating base (21). The layer of resist (23) is exposed to radiation (32) and developed to provide angled, tapered openings (33) exposing portions of the plating base (22). An electrically conductive material is electroplated on the exposed portions of the plating base (22) and fills the angled, tapered openings (33). The layer of resist (23) and portions of the plating base (22) between the electroplated conductive material are removed. The electrically conductive material forms the probe card probes (36) which are angled and tapered. In addition, the compliant probe card probes (56) may be stair-step shaped.
212 Citations
17 Claims
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1. A method for manufacturing a probe, comprising the steps of:
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providing a support structure having a first surface and at least one contact pad; forming a first layer of resist over the first surface and the at least one contact pad; forming at least one opening through the first layer of resist, the at least one opening having a longitudinal axis that makes an acute angle with the first surface; filling the at least one opening with a conductive material; and removing at least a portion of the first layer of resist adjacent the conductive material, wherein the conductive material serves as the probe. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for manufacturing a probe for mating with an integrated device, comprising the steps of:
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providing a support structure having a first surface and a contact pad formed thereon; covering the first surface and the contact pad with a plating base; covering the plating base with a layer of resist; forming an opening through a portion of the layer of resist to uncover at least a portion of the contact pad, wherein the opening has a non-normal longitudinal axis to the contact pad; filling the opening with at least one conductive material, the at least one conductive material serving as the probe; and removing a portion of the plating base adjacent the probe. - View Dependent Claims (14, 15, 16, 17)
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Specification