Amorphous oxide film and article having such film thereon
First Claim
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1. An amorphous complex oxide film consisting essentially of an oxide containing two metals, one metal being Si and the other metal being one member selected from the group consisting of Ti, Hf, Sn, Ta and In.
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Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
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8 Claims
- 1. An amorphous complex oxide film consisting essentially of an oxide containing two metals, one metal being Si and the other metal being one member selected from the group consisting of Ti, Hf, Sn, Ta and In.
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