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Amorphous oxide film and article having such film thereon

  • US 5,514,485 A
  • Filed: 12/19/1994
  • Issued: 05/07/1996
  • Est. Priority Date: 03/03/1988
  • Status: Expired due to Term
First Claim
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1. An amorphous complex oxide film consisting essentially of an oxide containing two metals, one metal being Si and the other metal being one member selected from the group consisting of Ti, Hf, Sn, Ta and In.

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