Fluorine-containing composition for forming anti-reflection film on resist surface and pattern formation method

• US 5,514,526 A
• Filed: 02/02/1994
• Issued: 05/07/1996
• Est. Priority Date: 06/02/1992
• Status: Expired due to Term

• Current Assignee: Shipley Company, LLC (Dow, Inc.)
• Original Assignee: Mitsubishi Chemical Corporation (Mitsubishi Chemical Group Corp.)
• Inventors: Makishima, Hideo, Nishi, Mineo
• Primary Examiner(s): McCamish, Marion E.
• Assistant Examiner(s): WEINER, LAURA S
• Application Number:
  US08/182,159
• Time in Patent Office: 825 Days
• Field of Search: 430/325, 430/273, 524/805
• US Class Current: 430/325
• CPC Class Codes: G03F 7/091 characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
• CPC Class Codes: G03F 7/70583 Speckle reduction, e.g. coherence control or amplitude/wavefront splitting

Abstract

A composition for forming anti-reflection film on resist surface which comprises an aqueous solution of a water soluble fluorine compound, and a pattern formation method which comprises the steps of coating a photoresist composition on a substrate; coating the above-mentioned composition for forming anti-reflection film; exposing the coated film to form a specific pattern; and developing the photoresist, are provided. Since the composition for forming anti-reflection film can be coated on the photoresist in the form of an aqueous solution, not only the anti-reflection film can be formed easily, but also, the film can be removed easily by rinsing with water or alkali development. Therefore, by the pattern formation method according to the present invention, it is possible to form a pattern easily with a high dimensional accuracy.

Claims

1. An aqueous composition for forming an anti-reflection film on a resist surface, which comprises a water-soluble fluorine compound, which comprises at least perfluoroalkyl alcohol-ethylene oxide adducts as the water-soluble fluorine compound.

2. The composition according to claim 1, wherein the composition further contains at least one other water-soluble fluorine compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof,

(2) perfluoroalkyl sulfonic acids and salts thereof,

(3) perfluoroalkyloxybenzene sulfonic acids and salts thereof,

(4) perfluoroalkylbenzene sulfonic acids and salt thereof,

(5) perfluoroalkyl amines and salts thereof, and

(6) perfluoroalkyl sulfonamides.

3. The composition according to claim 2, wherein the other water-soluble fluorine compound is at least one compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof,

(2) perfluoroalkyl sulfonic acids and salts thereof, and

(3) perfluoroalkyl amines and salts thereof.

4. The composition according to claim 2, wherein the other water-soluble fluorine compound is at least one compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof, and

(2) perfluoroalkyl sulfonic acids and salts thereof.

5. The composition according to claim 2, wherein for said mixture a ratio of perfluoroalkyl alcohol-ethylene oxide adducts (A) to said other water-soluble fluorine compound (B) is A/B=9/1-1/9, by weight.

6. The composition according to claim 5, wherein the ratio of perfluoroalkyl alcohol-ethylene oxide adducts (A) to said other water-soluble fluorine compound (B) is A/B=8/2-2/8, by weight.

7. The composition according to claim 1, wherein the aqueous solution of the water-soluble fluorine compound further contains a water-soluble macromolecular compound.

8. The composition according to claim 7, wherein said water-soluble macromolecular compound is at least one selected from the group consisting of starch, gelatin, casein, alginic acid, cellulose, polyvinyl alcohol, polyvinyl pyrrolidone, polyacrylic acid, polyacrylic amide, polymethacrylic acid, polymethyl vinyl ether, polyvinyl ethyl ether, and polyethylene glycol.

9. The composition according to claim 7, wherein the water-soluble macromolecular compound is polyvinyl pyrrolidone.

10. The composition according to claim 7, wherein a ratio of the water-soluble fluorine compound (C) to the water-soluble macromolecular compound (D) is C/D=9.5/0.5-0.5/9.5, by weight.

11. The composition according to claim 10, wherein the ratio of the water-soluble fluorine compound (C) to the water-soluble macromolecular compound (D) is C/D=9/1-4/6, by weight.

12. A pattern formation method, comprising:

a) coating a photoresist composition on a substrate;

b) coating on the obtained photoresist an aqueous composition for forming an anti-reflection film on said resist surface;

c) exposing the photoresist in the obtained surface anti-reflection film to form a specific pattern; and

d) developing the photoresist with an aqueous alkaline solution, wherein said aqueous composition for forming said anti-reflection film on said resist surface comprises a water-soluble fluorine compound, which comprises at least perfluoroalkyl alcohol-ethylene oxide adducts as the water-soluble fluorine compound.

13. The pattern formation method according to claim 12, wherein the composition further contains at least one other water-soluble fluorine compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof,

(2) perfluoroalkyl sulfonic acids and salts thereof,

(3) perfluoroalkyloxybenzene sulfonic acids and salts thereof,

(4) perfluoroalkylbenzene sulfonic acids and salt thereof,

(5) perfluoroalkyl amines and salts thereof, and

(6) perfluoroalkyl sulfonamides.

14. The pattern formation method according to claim 13, wherein the other water-soluble fluorine compound is at least one compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof,

(2) perfluoroalkyl sulfonic acids and salts thereof, and

(3) perfluoroalkyl amines and salts thereof

15. The pattern formation method according to claim 13, wherein the other water-soluble fluorine compound is at least one compound selected from the group consisting of

(1) perfluoroalkyl carboxylic acids and salts thereof, and

(2) perfluoroalkyl sulfonic acids and salts thereof.

16. The pattern formation method according to claim 13, wherein for said mixture a ratio of perfluoroalkyl alcohol-ethylene oxide adducts (A) to said other water-soluble fluorine compound (B) is A/B=9/1-1/9, by weight.

17. The pattern formation method according to claim 16, wherein the ratio of perfluoroalkyl alcohol-ethylene oxide adducts, (A) to said other water-soluble fluorine compound (B) is A/B=8/2-2/8, by weight.

18. The pattern formation method according to claim 12, wherein the aqueous solution of the water-soluble fluorine compound further contains a water-soluble macromolecular compound.

19. The pattern formation method according to claim 18, wherein said water-soluble macromolecular compound is at least one selected from the group consisting of starch, gelatin, casein, alginic acid, cellulose, polyvinyl alcohol, polyvinyl pyrrolidone, polyacrylic acid, polyacrylic amide, polymethacrylic acid, polymethyl vinyl ether, polyvinyl ethyl ether, and polyethylene glycol.

20. The pattern formation method according to claim 19, wherein the water-soluble macromolecular compound is polyvinyl pyrrolidone.

21. The pattern formation method according to claim 18, wherein a ratio of the water-soluble fluorine compound (C) to the water-soluble macromolecular compound (D) is C/D=9.5/0.5-0.5/9.5, by weight.

22. The pattern formation method according to claim 21, wherein the ratio of the water-soluble fluorine compound (C) to the water-soluble macromolecular compound (D) is C/D=9/1-4/6, by weight.

23. The pattern formation method according to claim 12, which further comprises rinsing the substrate with water after pattern exposure but before development.