Pressure measurement and calibration apparatus using gravity-induced diaphragm deflection

• US 5,515,711 A
• Filed: 06/26/1995
• Issued: 05/14/1996
• Est. Priority Date: 06/26/1995
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Hinkle, Luke D.
• Primary Examiner(s): Zimmerman, Brian
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/494,965
• Time in Patent Office: 323 Days
• Field of Search: 73/4 R, 73/4 V, 73/701, 73/718, 73/724, 73/745, 73/711
• US Class Current: 73/1.58
• CPC Class Codes: G01L 27/005 Apparatus for calibrating pressure sensors

Abstract

A pressure measurement and calibration apparatus for accurately detecting fluid pressures in the range of between approximately 0 and 1000 millitorr, and more particularly in the range of between 0 and 10 millitorr, and a method for calibrating an external pressure measuring device using the apparatus. The apparatus employs a pressure sensing assembly having a deflectable diaphragm and sensing electrodes. The assembly is rotated about an axis which is normal to the direction of local gravitational acceleration through preselected angles relative to the direction of local gravitational acceleration. The apparatus generates an output signal representative of the deflection of the diaphragm due to gravitational acceleration on the diaphragm at a given angular orientation. The apparatus then controllably conducts a fluid flow against the diaphragm at a sufficient pressure to substantially eliminate the deflection attributable to gravity on the diaphragm. The magnitude of the fluid pressure required to restore the diaphragm to its non-deflected state can then be computed with accuracy that is traceable to known primary standards.

Claims

1. Pressure measurement and calibration apparatus, comprising:

a pressure sensing assembly, said assembly including a deflectable diaphragm and means for detecting deflection of said diaphragm and for generating an output signal representative of said deflection;

means for controllably rotating said diaphragm about an axis normal to the direction of local gravitational acceleration on said diaphragm, whereby said diaphragm is capable of deflection in response to local gravitational acceleration on said diaphragm, said deflection of said diaphragm being variable as a function of the angle between said diaphragm and said direction of local gravitational force; and

means for controllably conducting a flow of a fluid against said diaphragm to substantially eliminate said deflection.

2. Apparatus according to claim 1 wherein said pressure sensing assembly comprises a capacitance manometer.

3. Apparatus according to claim 1 wherein said diaphragm comprises a metal foil.

4. Apparatus according to claim 1 wherein said diaphragm comprises a piston coupled to an elastic membrane.

5. Apparatus according to claim 1 wherein said means for rotating said diaphragm about said axis comprises a rotary device capable of rotating said diaphragm through at least 90 degrees of incremental rotation about said axis.

6. Apparatus according to claim 5 wherein said rotary device is a motor-driven rotary table to which said pressure sensing assembly is affixed.

7. Apparatus according to claim 1 wherein said fluid flow conducting means comprises a fluid source coupled to a distribution manifold.

8. Apparatus according to claim 7 further comprising isobaric coupling means for coupling said distribution manifold to at least one external device so that said external device and said diaphragm are at equal fluid pressures.

9. Apparatus according to claim 1 wherein said output signal is an electrical signal.

10. Apparatus according to claim 1 wherein said fluid is a gas.

11. A method of calibrating an external pressure measuring device at fluid pressures in the range of between approximately 0 and 1000 millitorr, comprising the steps of:

a) providing a pressure measurement and calibration apparatus comprising a pressure sensing assembly, said assembly including a deflectable diaphragm and means for detecting deflection of said diaphragm and for generating an output signal representative of said deflection, means for controllably rotating said diaphragm about an axis normal to the direction of local gravitational acceleration on said diaphragm, whereby said diaphragm is capable of deflection in response to local gravitational acceleration on said diaphragm, said deflection of said diaphragm being variable as a function of an angle θ

between said diaphragm and said direction of local gravitational acceleration, and means for controllably conducting a flow of a fluid against said diaphragm to substantially eliminate said deflection;

b) orienting said diaphragm to a reference orientation and establishing an output signal representative of said reference orientation of said diaphragm;

c) rotating said diaphragm about said axis through a preselected angular increment relative to said reference orientation to establish a gravity-induced deflection of said diaphragm at a corresponding first angular position of said diaphragm;

d) detecting said deflection of said diaphragm and generating an output signal representative of said deflection;

e) controllably conducting a flow of a fluid against said diaphragm to substantially eliminate said deflection of said diaphragm;

f) permitting said fluid flow to stabilize against said diaphragm at a pressure P_x ;

g) exposing said external pressure measuring device to said fluid flow at said pressure P_x through isobaric coupling means disposed between said diaphragm and said external pressure measuring device; and

h) calibrating said external pressure measuring device at said pressure P_x.

12. The method of claim 11 further comprising the step of:

(i) computing the value of said pressure P_x from the formula P_x =σ

gsinθ

, wherein σ

is the face area density of said diaphragm, g is the local gravitational acceleration on said diaphragm, and θ

is the angle of said diaphragm relative to said reference orientation.

13. The method of claim 12 further comprising the step of:

(j) repeating steps (c) through (i) for different angular orientations of said diaphragm relative to said reference orientation.

14. The method of claim 11 wherein said output signal is restored to said reference value when said fluid flow substantially eliminates said deflection of said diaphragm.

15. The method of claim 11 wherein said reference orientation is substantially parallel to the direction of local gravitational acceleration and said output signal reference value associated with said reference orientation of said diaphragm is representative of substantially zero gravity-induced deflection of said diaphragm.

16. The method of claim 11 further comprising the steps of:

(k) maintaining said fluid flow at said pressure P_x ;

(l) orienting said diaphragm to said reference orientation; and

(m) repeating steps (b)-(h) for different angular orientations of said diaphragm relative to said reference orientation.