Controlled force microscope for operation in liquids

• US 5,515,719 A
• Filed: 05/19/1994
• Issued: 05/14/1996
• Est. Priority Date: 05/19/1994
• Status: Expired due to Term

• Current Assignee: Agilent Technologies, Inc., Molecular Imaging Corporation A Wholly Owned Subsidiary of Agilent Technologies Incorporated
• Original Assignee: Molecular Devices
• Inventors: Lindsay, Stuart
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US08/246,035
• Time in Patent Office: 726 Days
• Field of Search: 73/105, 250/306
• US Class Current: 73/105
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: G01Q 30/14 Liquid environment
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/865 Magnetic force probe

Abstract

An atomic force microscope in which the deflection of the force sensing probe owing to surface forces is canceled by an opposing magnetic force applied to a small magnetic particle on a force sensing cantilever. A deflection of the force sensing cantilever is detected by reflecting a laser beam from the cantilever into a position sensitive detector. The voltage signal from the position sensitive detector is used to drive an integrating servo loop which drives a current in a solenoid placed close to the force sensing cantilever, and exerts a force opposing the atomic force of attraction between the force sensing cantilever and the sample surface via a small magnetic particle attached to the cantilever and having its magnetic moment aligned with the axis of the solenoid. In this way, deflection of the force sensing cantilever is prevented for any force within the range of the servo control system. The driving signal for the cantilever is a measure of the operating force of the microscope and can be used to drive a conventional atomic force microscope controller to generate topographical images of the surface. The system works submerged in water and other liquids and can be used for profiling soft surfaces while avoiding the problem of the force sensing cantilever being pulled into the sample surface by attractive interactions between the sample surface and the force sensing cantilever.

Claims

1. A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample, comprising:

a force sensing probe tip disposed on a first side of a free end of a flexible cantilever and adapted to be brought into close proximity to a sample surface;

an XY scanner for generating relative scanning movement between said force sensing probe tip and said sample surface;

a Z control for adjusting the distance between said force sensing probe tip and said sample surface;

a deflection detector for detecting deflection of said flexible cantilever; and

a magnetic control system responsive to said deflection of said flexible cantilever for providing a magnetic force to said flexible cantilever which counters an atomic force of attraction applied to said flexible cantilever due to interaction between said force sensing probe tip and said sample surface in order to minimize movement of said force sensing probe tip during scanning of said sample surface.

2. A scanning probe microscope according to claim 1 wherein said magnetic force is one attracting said force sensing probe away from said sample surface.

3. A scanning probe microscope according to claim 1 wherein:

said z-control further includes a signal generator for generating a signal which modulates said distance between said force sensing probe tip and said sample surface.

4. A scanning probe microscope according to claim 3 wherein:

said modulation of said distance between said force sensing probe tip and said sample surface is detected with a lock in detector which produces an error signal which is applied to said z-control in order to reduce the bandwidth of said deflection detector.

5. A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample, comprising:

a force sensing probe tip disposed on a first side of a free end of a flexible cantilever and adapted to be brought into close proximity to a sample surface;

an XY scanner for generating relative scanning movement between said force sensing probe tip and said sample surface;

a Z control for adjusting the distance between said force sensing probe tip and said sample surface;

a deflection detector for detecting deflection of said flexible cantilever; and

a magnetic control system responsive to said deflection of said flexible cantilever for providing a magnetic force to said flexible cantilever which counters an atomic force of attraction applied to said flexible cantilever due to interaction between said force sensing probe tip and said sample surface in order to minimize movement of said force sensing probe tip during scanning of said sample surface,

wherein said magnetic control system includes;

a magnetic material capable of being attracted by a solenoid disposed on said flexible cantilever; and

a solenoid having a current flowing therein, said solenoid oriented to be capable of exerting an attractive magnetic force upon said magnetic material, said current flowing in said solenoid responsive to said deflection of said flexible cantilever such that increasing deflection results in increasing current flow within said solenoid.

6. A scanning probe microscope according to claim 5 wherein said flexible cantilever, said force sensing probe tip and said sample surface are all submerged in a fluid.

7. A scanning probe microscope according to claim 6 wherein said fluid is a liquid.

8. A scanning probe microscope according to claim 7 wherein said fluid is water.

9. A scanning probe microscope according to claim 5 wherein said magnetic force is one of attraction between said magnetic material and said solenoid.

10. A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample, comprising:

a force sensing probe tip disposed on a first side of a free end of a flexible cantilever and adapted to be brought into close proximity to a sample surface;

an XY scanner for generating relative scanning movement between said force sensing probe tip and said sample surface;

a Z control for adjusting the distance between said force sensing probe tip and said sample surface;

a deflection detector for detecting deflection of said flexible cantilever; and

a magnetic control system responsive to said deflection of said flexible cantilever for providing a magnetic force to said flexible cantilever which counters an atomic force of attraction applied to said flexible cantilever due to interaction between said force sensing probe tip and said sample surface in order to minimize movement of said force sensing probe tip during scanning of said sample surface

wherein said magnetic control system includes;

a magnetic material capable of being attracted by a solenoid disposed on said flexible cantilever; and

a solenoid having a current flowing therein, said solenoid oriented to be capable of generating a magnetic field extending along its axis and varying in magnitude as a function of linear distance from said solenoid, said magnetic material oriented so that it has a substantial magnetic moment directed substantially parallel to said axis of said solenoid, and said current flowing in said solenoid responsive to said deflection of said flexible cantilever in a manner that increasing deflection of said flexible cantilever results in increasing current flow within said solenoid.

11. A microscope for determining the characteristics of the surface of a sample, said microscope comprising:

a force sensing probe tip disposed on a free end of a flexible cantilever;

means for detecting bending of said cantilever;

means for scanning said force sensing probe tip relative to the surface of the sample; and

means responsive to said bending for applying a magnetic compensating force to said force sensing probe tip for cancelling deflection of said probe.

12. A microscope according to claim 11 wherein said force sensing probe tip and the surface of the sample are all submerged in a fluid.

13. A microscope according to claim 12 wherein said fluid is a liquid.

14. A microscope according to claim 13 wherein said fluid is water.

15. A microscope for determining the characteristics of the surface of a sample, said microscope comprising:

a force sensing probe tip disposed on a free end of a flexible cantilever;

means for detecting bending of said cantilever;

means for scanning said force sensing probe tip relative to the surface of the sample; and

means responsive to said bending for applying a magnetic compensating force to said force sensing probe tip for cancelling deflection of said probe,

wherein said magnetic compensating force is one only pulling said force sensing probe away from the surface of the sample.