Piezoelectric bimorph type acceleration sensor

• US 5,515,725 A
• Filed: 03/18/1994
• Issued: 05/14/1996
• Est. Priority Date: 03/19/1993
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Unami, Toshihiko, Inoue, Jiro, Tabota, Jun
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US08/210,004
• Time in Patent Office: 788 Days
• Field of Search: 73/517 R, 73/505, 73/504, 310/329, 310/331, 310/364, 310/366
• US Class Current: 73/514.34
• CPC Class Codes: G01P 15/0922 of the bending or flexing mode type

Abstract

An acceleration sensor includes a sensor body obtained by forming first and second signal electrodes on outer major surfaces of first and second piezoelectric ceramic plates which are pasted to each other through an intermediate electrode. The sensor body is formed to be mechanically supported in the form of a center beam, and has first to third regions formed so that stress is caused in different directions in adjacent ones of the first to third regions upon acceleration. The first and second piezoelectric ceramic plates are polarized in opposite directions in the second region so that charges which are opposite in polarity to charges generated in the second region are not drawn from the signal electrodes in the first and third regions.

Claims

1. An acceleration sensor comprising:

first and second piezoelectric ceramic plates each having first and second major surfaces;

a first signal electrode being formed on said first major surface of said first piezoelectric ceramic plate;

a second signal electrode being formed on said first major surface of said second piezoelectric ceramic plate; and

an intermediate electrode being arranged between said second major surfaces of said first and second piezoelectric ceramic plates,

said first and second piezoelectric ceramic plates being bonded to each other with said intermediate electrode located therebetween so as to form a sensor body,

said sensor body being mechanically held at locations along said sensor body close to both ends of said sensor body,

said sensor body having first, second and third regions located along a length of said sensor body and formed so that stress is caused in different directions in adjacent regions of said first, second and third regions upon an acceleration force acting on said sensor body,

said first and second piezoelectric ceramic plates being polarized in opposite directions in said second region, said second region being located at a center of said sensor body,

said acceleration sensor further comprising means for preventing first charges which are opposite in polarity to second charges generated in said second region from being drawn from said signal electrodes in said first and third regions of said sensor body, wherein said first and second charges are generated by acceleration acting on said sensor body.

2. An acceleration sensor in accordance with claim 1, wherein

said first and second piezoelectric ceramic plates are polarized in said first and third regions in directions opposite to a direction of polarization of said second region, and

said first and second signal electrodes are formed so that portions of said first and second signal electrodes that are disposed opposite to each other through said first and second piezoelectric ceramic plates reach said first, second and third regions,

whereby charges which are identical in polarity to said charges generated in said second region are drawn from said first and second signal electrodes in said first and third regions.

3. An acceleration sensor in accordance with claim 2, further comprising first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

4. An acceleration sensor in accordance with claim 3, further comprising cavities formed in each of said holding members defining spaces for allowing displacement of said piezoelectric ceramic plates, each of said holding members being bonded to said first and second piezoelectric ceramic plates.

5. An acceleration sensor in accordance with claim 2, further comprising a case member for holding said sensor body,

said sensor body being held by said case member so that an insensitive direction of said sensor body is inclined neither in parallel with nor perpendicularly to a surface of said case member being mounted on an external device.

6. An acceleration sensor in accordance with claim 5, wherein

said case member comprises first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

7. An acceleration sensor in accordance with claim 2, wherein said sensor body is formed by a sintered body obtained by stacking first and second ceramic green sheets with said intermediate electrode located therebetween to form a stack to be sintered and firing the stack to be sintered to form said sensor body.

8. An acceleration sensor in accordance with claim 1, wherein

said means for preventing charges which are opposite in polarity to said charges generated in said second region from being drawn from said signal electrodes in said first and third regions is formed so that said first and second signal electrodes are opposed to each other only in said second region.

9. An acceleration sensor in accordance with claim 8, wherein

said first and third regions are not polarized.

10. An acceleration sensor in accordance with claim 9, further comprising first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

11. An acceleration sensor in accordance with claim 9, further comprising cavities formed in each of said holding members defining spaces for allowing displacement of said piezoelectric ceramic plates, each of said holding members being bonded to said first and second piezoelectric ceramic plates.

12. An acceleration sensor in accordance with claim 9, further comprising a case member for holding said sensor body,

said sensor body being held by said case member so that an insensitive direction of said sensor body is inclined neither in parallel with nor perpendicularly to a surface of said case member being mounted on an external device.

13. An acceleration sensor in accordance with claim 12, wherein

said case member comprises first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

14. An acceleration sensor in accordance with claim 9, wherein said sensor body is formed by a sintered body obtained by stacking first and second ceramic green sheets on each other having said intermediate electrode located therebetween to form a stack to be sintered and firing the stack to be sintered to form said sensor body.

15. An acceleration sensor in accordance with claim 8, wherein

said first and second piezoelectric ceramic plates are uniformly polarized along thicknesses thereof.

16. An acceleration sensor in accordance with claim 15, further comprising first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

17. An acceleration sensor in accordance with claim 16, further comprising cavities formed in each of said holding members defining spaces for allowing displacement of said piezoelectric ceramic plates, each of said holding members being bonded to said first and second piezoelectric ceramic plates.

18. An acceleration sensor in accordance with claim 15, further comprising a case member for holding said sensor body,

said sensor body being held by said case member so that an insensitive direction of said sensor body is inclined neither in parallel with nor perpendicularly to a surface of said case member being mounted on an external device.

19. An acceleration sensor in accordance with claim 18, wherein

said case member comprises first and second holding members being fixed to said sensor body on both ends thereof for holding said sensor body from both sides along thicknesses of said first and second piezoelectric ceramic plates.

20. An acceleration sensor in accordance with claim 15, wherein said sensor body is formed by a sintered body obtained by stacking first and second ceramic green sheets on each other with said intermediate electrode located therebetween to form a stack to be sintered and firing the stack to be sintered to form the sensor body.

21. An acceleration sensor comprising:

first and second piezoelectric ceramic plates each having first and second major surfaces;

a first signal electrode being formed on said first major surface of said first piezoelectric ceramic plate;

a second signal electrode being formed on said first major surface of said second piezoelectric ceramic plate; and

an intermediate electrode being arranged between said second major surfaces of said first and second piezoelectric ceramic plates,

said first and second piezoelectric ceramic plates being bonded to each other with said intermediate electrode located therebetween so as to form a sensor body,

said sensor body having first, second and third regions located along a length of said sensor body and formed so that stress is caused in different directions in adjacent regions of said first, second and third regions upon an acceleration force acting on said sensor body;

wherein

said sensor body is formed so that first charges which are opposite in polarity to second charges generated in said second region are not drawn from said signal electrodes in said first and third regions of said sensor body, wherein said first and second charges are generated by acceleration acting on said sensor body.

22. The acceleration sensor of claim 21, wherein said first and second piezoelectric ceramic plates are polarized in opposite directions in said second region, said second region being located at a center of said sensor body, said first and second piezoelectric ceramic plates being polarized in said first and third regions in directions opposite to a direction of polarization of said second region.

23. The acceleration sensor of claim 21, further comprising first and second holding members fixed to said sensor body for holding said sensor body from both sides at locations extending along thicknesses of said first and second piezoelectric ceramic plates, each of said first and second holding members having cavities formed therein defining spaces for allowing displacement of said first and second piezoelectric ceramic plates.