Fluid dispensing system

• US 5,516,429 A
• Filed: 08/18/1993
• Issued: 05/14/1996
• Est. Priority Date: 03/28/1989
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Fastar Ltd.
• Inventors: Gibson, Gregory M., Snodgrass, Ocie T., Farney, Michael K.
• Primary Examiner(s): Drodge, Joseph W.
• Application Number:
  US08/107,866
• Time in Patent Office: 1,000 Days
• Field of Search: 210/102, 210/141, 210/142, 210/258, 210/416.1, 210/416.4, 210/416.5, 210/418, 210/420, 210/424, 210/741, 210/134, 210/138, 210/143, 210/90, 210/321.65, 417/2, 417/7, 417/20, 417/22, 417/216, 417/244, 417/246, 417/253, 417/383, 417/385, 417/386, 417/387, 417/388, 417/401, 417/415, 417/426, 417/428, 417/472, 417/473, 417/540 , 417/541, 417/542, 417/543, 222/189, 222/255, 222/334, 364/496, 364/502, 118/323, 156/345
• US Class Current: 210/767
• CPC Class Codes: B01D 29/15 arranged for inward flow filtration
• CPC Class Codes: B01D 29/46 of flat, stacked bodies
• CPC Class Codes: B01D 35/26 Filters with built-in pumps filters provided with a pump mounted in or on the casing aquarium pumps or filters A01K63/04
• CPC Class Codes: F04B 15/02 the fluids being viscous or non-homogeneous
• CPC Class Codes: F04B 43/067 the fluid being actuated directly by a piston
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means
• CPC Class Codes: F04B 9/02 the means being mechanical
• CPC Class Codes: F04B 9/1095 having two or more pumping chambers in series
• CPC Class Codes: Y10S 210/90 Ultra pure water, e.g. conductivity water
• CPC Class Codes: Y10T 428/1234 Honeycomb, or with grain orientation or elongated elements in defined angular relationship in respective components [e.g., parallel, inter- secting, etc.]

Abstract

A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of said first pump, and accumulator/second diaphragm pump means connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.

Claims

1. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating said incremental pump advancement means.

2. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said second pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of dispensing said fluid with said second pumping means includes the step of operating said incremental pump advancement means.

9. The method of claim 2 or claim 5, or claim 8, further including the step of operating said incremental pump advancement means to suckback fluid from the dispense.

3. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means and said second pumping means are diaphragm-type pumps independently operated by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating its respective said incremental pump advancement means.

4. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through filtering means and then through valve means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating said incremental pump advancement means.

5. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through filtering means and then through valve means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said second pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of dispensing said fluid with said second pumping means includes the step of operating said incremental pump advancement means.

6. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through filtering means and then through valve means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means and said second pumping means are diaphragm-type pumps independently operated by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating its respective said incremental pump advancement means.

7. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and then through filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating said incremental pump advancement means.

8. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and then through filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said second pumping means is a diaphragm-type pump operable by incremental pump advancement means, and said step of dispensing said fluid with said second pumping means includes the step of operating said incremental pump advancement means.

10. A method for filtering and dispensing an industrial fluid which is viscous and/or high purity and/or shear sensitive and is used in manufacture of an article, comprising the steps of:

pumping said fluid with first pumping means through valve means and them through filtering means;

receiving said fluid in second pumping means;

preventing backflow of filtered fluid; and

dispensing said fluid by operating said second pumping means, in which said first pumping means and said second pumping means are diaphragm-type pumps independently operated by incremental pump advancement means, and said step of pumping said fluid with said first pumping means includes the step of operating its respective said incremental pump advancement means.

11. The method of claim 3 or claim 6 or claim 10, further including the step of operating said incremental pump advancement means to suckback fluid from the dispense.