Method for forming LDD CMOS with oblique implantation

• US 5,516,711 A
• Filed: 12/16/1994
• Issued: 05/14/1996
• Est. Priority Date: 12/16/1994
• Status: Expired due to Term

• Current Assignee: ProMOS Technologies, Inc.
• Original Assignee: Mosel Vitelic Incorporated
• Inventors: Wang, Chih-Hsien
• Primary Examiner(s): Thomas, Tom
• Assistant Examiner(s): GURLEY, LYNNE ANN
• Application Number:
  US08/357,486
• Time in Patent Office: 515 Days
• Field of Search: 437/34, 437/35, 437/57, 437/44
• US Class Current: 438/217
• CPC Class Codes: H01L 21/26586 characterised by the angle between the ion beam and the crystal planes or the main crystal surface
• CPC Class Codes: H01L 21/823807 with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
• CPC Class Codes: H01L 27/0928 comprising both N- and P- wells in the substrate, e.g. twin-tub
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET

Abstract

A method and structure therefor for the formation of lightly doped drain regions, typically used in the manufacture of a field effect devices. The method includes the steps of providing a semiconductor substrate with a P type well region and an N type well region. Gate electrodes are formed overlying gate dielectric over each P type well and N type well regions. The method then performs a blanket N type implant step at an angle being about 20 degrees and greater from a perpendicular to the gate electrodes into both the P type and N type well regions. The blanket N type implant forms an LDD region in the P type well, and a buried region in the N type well. Sidewall spacers are then formed on edges of the gate electrodes. An N type implant step is then performed on the P type well region to form the source/drain region of a NMOS device. The method then performs two separate P type implants into the N type well, each at different angles and dosages, to form the P type LDD source/drain region for a PMOS device. The PMOS device includes the buried region which acts as a punchthrough stop, typically used to decrease short channel effects.

Claims

1. A method of forming a semiconductor integrated circuit comprising the steps of:

providing a semiconductor substrate having a first well region of a first conductivity type and a second well region of a second conductivity type;

forming a first gate electrode overlying gate dielectric on said first well region and a second gate electrode overlying gate dielectric on said second well region;

implanting first impurities at a first implant angle into said first well region and adjacent to said first gate electrode, and said second well region and adjacent to said second gate electrode, said first implant step being at said second conductivity type and at a first dose;

forming sidewall spacers on edges of said first gate electrode and said second gate electrode;

implanting second impurities at a second angle into said first well region and adjacent to said first gate electrode, said second implant being at said second conductivity type and at a second dose which is greater than said first dose;

implanting third impurities at a third angle into said second well region and adjacent to said second gate electrode, said third implant step being at said first conductivity type and at a third dose; and

implanting fourth impurities at a fourth angle into said second well region and adjacent to said second gate electrode, said fourth implant step being at said first conductivity type and at a fourth dose which is different from said third dose;

wherein said fourth implant step forms an LDD (lightly doped drain) region in said second well region, said LDD region extending under a first portion of said sidewall spacers on said edges of said second gate electrode and extending under a portion of said second gate electrode, and said third implant step forming a S/D (source/drain) region in said second well region, said S/D region extending under a second portion of said sidewall spacers on said edges of said second gate electrode, the LDD region portion under said second gate electrode being of a greater length than the LDD region portion under said sidewall spacers.

2. The method of claim 1 wherein said first implant step forms an LDD region of a field effect transistor in said first well region.

3. The method of claim 1 wherein said first implant step forms a pocket region entirely underneath said LDD region in said second well region and adjacent to said S/D region in said second well region.

4. The method of claim 3 wherein said pocket region is a punchthrough stopper.

5. The method of claim 1 wherein said first conductivity type is a P type and said second conductivity type is an N type.

6. The method of claim 1 wherein said first implant positions said second conductivity type impurities under a portion of said first gate electrode.

7. The method of claim 1 wherein said fourth dose is less than said third dose.

8. The method of claim 7 wherein said fourth dose ranges between 1×

10¹³ atoms/cm² and about 3×

10¹³ atoms/cm² and said third dose ranges between 3×

10¹⁵ atoms/cm² and about 5×

10¹⁵ atoms/cm².

9. The method of claim 7 wherein said third dose is about 4×

10¹⁵ atoms/cm².

10. The method of claim 7 wherein said fourth dose is about 2×

10¹³ atoms/cm².

11. The method of claim 1 wherein said third dose is less than said fourth dose.

12. The method of claim 1 wherein said first angle and said fourth angle are at the same angle.

13. The method of claim 1 wherein said second and said third angle include angles less than about 7 degrees from a perpendicular from said first gate electrode and said second gate electrode, respectively.

14. The method of claim 1 wherein said first angle includes an angle greater than about 20 degrees from a perpendicular from said first gate electrode.

15. The method of claim 14 wherein said first angle includes an angle about 35 degrees to about 45 degrees from the perpendicular from said first gate electrode.

16. The method of claim 1 wherein said fourth angle includes an angle greater than about 20 degrees from a perpendicular from said second gate electrode.

17. The method of claim 16 wherein said fourth angle includes an angle about 35 degrees to about 45 degrees from the perpendicular from said second gate electrode.

18. A method of fabricating a CMOS integrated circuit device comprising the steps of:

providing a partially completed semiconductor substrate comprising a P type well region, an N type well region, a gate oxide layer overlying said P type well region and said N type well region, a first gate electrode over said P type well region, and a second gate electrode over said N type well region;

implanting first N type impurities at an angle being about 20 degrees or greater from a perpendicular to said first gate electrode and said second gate electrode into said P type well region and said N type well region, said first N type implant step penetrating regions beneath said first gate electrode and said second gate electrode, and forming a buried region at said N type well region and an LDD region at said P type well region;

forming sidewall spacers on edges of said first gate electrode and said second gate electrode;

implanting second N type impurities into said P type well region at an angle being about 7 degrees or less from a perpendicular to said first gate electrode, said second implant being at a greater does then said first N type implant;

implanting first P type impurities at an angle being about 7 degrees or less from a perpendicular to said second gate electrode; and

implanting second P type impurities at an angle being about 20 degrees or greater from a perpendicular to said second gate electrode, said second P type implant being at a lower dose than said first P type implant and penetrating a region beneath said second gate electrode;

wherein said first P type implant step forms a S/D region in said N type well region which extends under a first portion of said sidewall spacers on said edges of said second gate electrode such that said second P type implant step forms an LDD region in said N type well region which extends under a second portion of said sidewall spacers on said edges of said second gate electrode and further under a part of said second gate electrode.

19. The method of claim 18 wherein said first N type implant step forms a pocket region entirely underneath said LDD region in said N type well region and adjacent to said S/D region in said N type well region.

20. The method of claim 19 wherein said pocket region is a punchthrough stopper.

21. The method of claim 19 wherein the LDD region portion under said second gate electrode is of a greater length than the LDD region portion under said sidewall spacers at edges of said second gate electrode.

22. A method of forming a semiconductor integrated circuit comprising the steps of:

forming a first gate electrode overlying a P type well region and a second gate electrode overlying a N type well region, said P type well region and said N type well region being formed in a substrate;

implanting first N type impurities at a first dose and at a first implant angle into said P type well region and adjacent to said first gate electrode, and said N type well region and adjacent to said second gate electrode;

forming sidewall spacers on edges of said first gate electrode and said second gate electrode;

implanting second N type impurities at a second dose and at a second angle into said P type well region and adjacent to said first gate electrode, said second dose being greater than said first dose;

implanting first P type impurities at a third dose and at a third angle into said N type well region and adjacent to said second gate electrode;

implanting second P type impurities at a fourth dose and at a fourth angle into said N type well region and adjacent to said second gate electrode, said fourth dose being different from said third dose; and

wherein said steps of implanting first and second P type impurities form an LDD region and a S/D region in said N type well region, said LDD region extending a distance L_G under part of said second gate electrode greater than a distance L_S under a part of said sidewall spacers at said edges of said second gate electrode, and said S/D region being adjacent to said LDD region at a point under said sidewall spacers, wherein L_G ranges from about 0.105 μ

m to about 0.125 μ

m and L_S ranges from about 0.045 μ

m to about 0.075 μ

m.

23. The method of claim 22 wherein L_G is about 0.115 μ

m and L_S is about 0.055 μ

m.

24. The method of claim 22 wherein a channel width of the device formed in said N type well region is about 0.4 μ

m or less.