Photosensor for detecting the position of incident light in two dimensions using a pair of film resistors and a photoconductive element sandwiched therebetween

• US 5,517,017 A
• Filed: 06/22/1994
• Issued: 05/14/1996
• Est. Priority Date: 08/21/1992
• Status: Expired due to Term

• Current Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Original Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Inventors: Yamada, Manabu, Maeda, Yutaka, Shirai, Makoto, Nakamura, Masaya, Terada, Tomotsugu
• Primary Examiner(s): Westin, Edward P.
• Assistant Examiner(s): CALOGERO, STEPH
• Application Number:
  US08/211,823
• Time in Patent Office: 692 Days
• Field of Search: 250/214.1, 250/203.4, 250/206.2, 250/203.1, 250/203.3, 250/203.6, 250/203.2, 250/208.2, 250/214 R, 257/431 R, 257/434, 257/435, 126/573
• US Class Current: 250/203.4
• CPC Class Codes: G01C 21/02 by astronomical means G01C21/24, G01C21/26 take precedence
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 31/02024 Position sensitive and lateral effect photodetectors; Quadrant photodiodes
• CPC Class Codes: H01L 31/02164 for shielding light, e.g. light blocking layers, cold shields for infrared detectors

Abstract

A position detection element 4 is formed by sequentially depositing an X-axis resistor film 5, a photoconductive film 6 and a Y-axis resistor film 7 on one surface of a glass substrate 2 which is a transparent member. Further, a light screening film 3 is formed on the other surface of the glass substrate 2. At that time, a pin hole 31 through which light is transmitted is formed at a central portion of the light screening film 3. Where the position detection element 4 and the light screening film 3 are formed integrally with and on the glass substrate 2, mounting of the glass substrate 2 on a casing of a sensor enables the position detection element 4 and the light screening film 3 to be mounted on the casing of the sensor, thus improving the mounting property of the light position detection element 4 and the light screening film 3 on the casing.

Claims

1. A photosensor for detecting the position of incident light in two dimensions and the photoelectric current, comprising:

a transparent member made of glass substrate and having parallel first and second surfaces;

X-axis light position detection element for detecting a X-axis position of light illuminated thereon;

Y-axis light position detection element for detecting a Y-axis position of light illuminated thereon;

a plurality of photoelectric current detection elements for detecting a photoelectric current due to a photoelectromotive force generated on a portion thereof illuminated with said light according to an intensity of said light, said X-axis light position detection element, said Y-axis light position detection element and said plurality of photoelectric current detection elements being disposed on said first surface of said transparent member;

a light screening film mounted on said second surface of said transparent member and having a cross-shaped transmission hole through which light illuminated thereon passes.

2. The photosensor according to claim 1, wherein at least one of said X-axis light position detection element and Y-axis light position detection element is disposed between said plurality of photoelectric current detection elements and parallel thereto.

3. The photosensor according to claim 1, wherein said X-axis light position detection element and Y-axis light position detection element are resister films having a voltage gradient, said plurality of photoelectric current detection elements are transparent conductive films on which a certain voltage is applied uniformly.

4. The photosensor according to claim 1, wherein said cross-shaped transmission hole extends along a X-axis direction and a Y-axis direction of said light screening film, said X-axis light position detection element, said Y-axis light position detection element and said plurality of photoelectric current detection elements have respectively rectangular shape, said X-axis light position detection element and said plurality of photoelectric current detection elements sandwiching said X-axis light position detection element being disposed on said first surface of said transparent member in such a manner that a longitudinal direction of said X-axis direction of said cross-shaped transmission hole forms a right angle to a longitudinal direction of said X-axis light position detection element;

said Y-axis light position detection element and said plurality of photoelectric current detection elements sandwiching said Y-axis light position detection element being disposed on said first surface of said transparent member in such a manner that a longitudinal direction of Y-axis direction of said cross-shaped transmission hole forms a right angle to a longitudinal direction of said Y-axis light position detection element.