Apparatus including ring-shaped resonators for producing microwave plasmas

• US 5,517,085 A
• Filed: 10/25/1993
• Issued: 05/14/1996
• Est. Priority Date: 10/23/1992
• Status: Expired due to Fees

• Current Assignee: Jurgen Engemann
• Original Assignee: Jurgen Engemann
• Inventors: Werner, Frank, Engemann, Jurgen
• Primary Examiner(s): Lee, Benny T.
• Application Number:
  US08/142,667
• Time in Patent Office: 932 Days
• Field of Search: 315/111.01, 315/111.21, 315/111.41, 315/111.51, 118/723 MW, 118/723 MA, 118/723 AN, 204/298.37, 204/298.38, 156/345, 333/99 PL
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32247 Resonators
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

A low-pressure high-density plasma is excited in a plasma chamber surrounded by a cylindrical inner wall of a ring-shaped waveguide resonator to which the microwave energy is fed by a coupling from a microwave generator. The output coupling of the microwave energy from the standing wave maintained in the waveguide resonator to the plasma chamber is effected through a multiplicity of equispaced slits whose spacing is one half or one waveguide wavelength and which extend parallel to the generatrices of the cylindrical inner wall of the ring-shaped waveguide resonator.

Claims

1. An apparatus for producing a low-pressure plasma, comprising:

a plasma chamber adapted to contain a low-pressure plasma;

at least one circular ring-shaped waveguide resonator surrounding said plasma chamber and provided in an inner wall thereof with a plurality of coupling slits spaced and oriented to effect substantially equal microwave power output coupling from said at least one resonator to said chamber at all of said coupling slits;

at least one microwave generator; and

coupling means connecting said at least one microwave generator with corresponding said at least one waveguide resonator for input coupling of microwave energy from said at least one microwave generator to said at least one waveguide resonator, said at least one ring-shaped waveguide resonator having respective dimensions which are sufficient to generate a TE10 standing wave with a magnetic field having an azimuthal component therein in response to microwave energy coupled to said at least one waveguide resonator from said at least one microwave generator, said coupling slits being spaced equidistantly from one another around said inner wall of said at least one circular resonator and around said standing wave, said inner wall being cylindrical and said coupling slits are parallel to generatrices of the inner wall and are spaced apart by a distance equal to a wavelength of the microwave energy coupled into said at least one waveguide resonator, and the coupling slits output couple the energy of the standing TE10 wave by the penetration of the azimuthal component of a magnetic field through the coupling slits into the plasma chamber.

2. The apparatus defined in claim 1 wherein said at least one ring-shaped waveguide resonators comprises a plurality of ring-shaped waveguide resonators which are provided and are respectively fed by coherently driven microwave generators.

3. The apparatus defined in claim 1 wherein said at least one ring-shaped waveguide resonator comprises a plurality of ring-shaped waveguide resonators which are provided and are coupled together by a common feed resonator, all of the ring-shaped resonators receiving the same power.

4. The apparatus defined in claim 1 wherein said at least one microwave generator is one of a plurality of microwave generators are coupled to said at least one ring-shaped waveguide resonator at respective coupling locations.

5. The apparatus defined in claim 1 wherein said at least one ring-shaped waveguide resonator has opposing sides, and said apparatus further comprises two magnetic coils, one on each side of said at least one ring-shaped waveguide resonator, for generating an electron-cyclotron-resonance zone in said plasma.

6. The apparatus defined in claim 1 wherein said coupling slits each have lengths each equal to a half free-space wavelength.

7. The apparatus defined in claim 1 wherein said means for coupling includes a respective tuning unit between said at least one microwave generator and corresponding said at least one waveguide resonator and a respective capacitive coupler for feeding microwave energy from said tuning unit into said at least one waveguide resonator.

8. The apparatus defined in claim 1 wherein said means for coupling includes a respective tuning unit between said at least one microwave generator and corresponding said at least one waveguide resonator and an respective inductive coupler for feeding microwave energy from said tuning unit into said at least one waveguide resonator.

9. The apparatus defined in claim 1 wherein said means for coupling includes a respective tuning unit between said at east one microwave generator and corresponding said at least one waveguide resonator and a respective adjustable coupling pin for feeding microwave energy from said respective tuning unit into said at least one waveguide resonator.

10. The apparatus defined in claim 9 wherein said respective coupling pin has an axis and is adjustable along the axis of the coupling pin.

11. The apparatus defined in claim 1 wherein said plasma chamber is separated from the respective inner wall of said at least one ring-shaped waveguide resonator by a cylinder of a dielectric material.

12. The apparatus defined in claim 11 wherein said cylinder of a dielectric material is composed of quartz glass or an aluminum-oxide ceramic.

13. The apparatus defined in claim 1 wherein said plasma chamber is composed of metal and said coupling means includes a vacuum-tight window closing said chamber and said window being composed of a dielectric material.

14. The apparatus defined in claim 1 wherein said at least one ring-shaped waveguide resonator has opposing sides, and said apparatus further comprises two magnetic coils on one side of the at least one ring-shaped waveguide resonator for generating an electron-cyclotron-resonance zone in said plasma.

15. The apparatus defined in claim 1 wherein said plasma chamber has a cylindrical wall surrounded by the respective inner wall of the ring-shaped waveguide resonator, and said apparatus further comprises an assembly of permanent magnets polarized perpendicular to said wall of said plasma chamber and located between the respective inner wall of the at least one ring-shaped waveguide resonator and the plasma chamber wall for producing an electron-cyclotron-resonance zone in said plasma.

16. The apparatus defined in claim 15 wherein at each of said coupling slits, two like polarized permanent magnets of said assembly are provided, the magnets of successive slits along said inner wall being polarized oppositely to one another.

17. An apparatus for producing a low-pressure plasma, comprising:

a plasma chamber adapted to contain a low-pressure plasma;

a circular ring-shaped waveguide resonator surrounding said plasma chamber and provided in an inner wall thereof with a plurality of coupling slits spaced and oriented to effect substantially equal microwave power output coupling from said resonator to said chamber at all of said coupling slits;

a microwave generator; and

coupling means connecting said microwave generator with said waveguide resonator for input coupling of microwave energy from said microwave generator to said waveguide resonator, said ring-shaped waveguide resonator having dimensions which are sufficient to generate a TE10 standing wave with a magnetic field having an azimuthal component therein in response to microwave energy coupled to said waveguide resonator from said microwave generator, said coupling slits being spaced equidistantly from one another around said inner wall and around said standing wave, said inner wall being cylindrical and said coupling slits are parallel to generatrices of the inner wall, and the coupling slits output couple the energy of the standing TE10 wave by the penetration of the azimuthal component of a magnetic field through the coupling slits, into the plasma chamber.

18. The apparatus defined in claim 17 wherein successive coupling slits around said inner wall are spaced apart by a half wavelength of the microwave energy coupled into said waveguide resonator.