Interferometric measuring apparatus employing fixed non-zero path length difference

• US 5,517,308 A
• Filed: 11/29/1994
• Issued: 05/14/1996
• Est. Priority Date: 12/04/1993
• Status: Expired due to Term

• Current Assignee: Renishaw PLC
• Original Assignee: Renishaw PLC
• Inventors: McMurtry, David R.
• Primary Examiner(s): Gonzalez, Frank
• Assistant Examiner(s): KIM, ROBERT H
• Application Number:
  US08/350,137
• Time in Patent Office: 532 Days
• Field of Search: 356/345, 356/358, 356/361
• US Class Current: 356/517
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/0207 Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer

Abstract

A combined interferometer and refractometer includes two interferometers each of which uses a light beam produced from a common source which are split into measuring component beams and reference component beams. The measuring component beams are directed along parallel paths to an object and are reflected back from reflecting surfaces on the object which is so positioned as to produce a fixed path length difference between the beams. The reflected beams are re-combined with the reference component beams to produce output beams which pass to a detector system which derives an output signal from each. Changes in refractive index are determined from any difference in the two output signals, and the distance moved by the object is determined from any change in either one of the output signals or by summing them and dividing by two. Methods are described whereby the measurements of refractive index or of distance can be made absolute.

Claims

1. Interferometric measuring apparatus for measuring movements of an object in a fluid medium, the apparatus comprising:

means for producing two collimated, coherent light beams,

beam splitting means for splitting each of the two light beams into two components to provide two measuring component beams and two reference component beams, the measuring component beams being directed in parallel through the fluid medium towards reflecting surfaces on the object the movement of which is to be measured, the beam splitting means re-combining the respective measuring and reference component beams after reflection of the measuring component beams from said surfaces to produce two output combined beams,

detector means for receiving each of the two output combined beams,

wherein a fixed non-zero path length difference is established in the fluid medium between one of a) the two reference component beams and b) the two measuring component beams, and the detector means includes means for providing from the two output combined beams electrical signals indicative of both the relative phase difference of the two output combined beams, and the temporal phase changes of at least one of the output combined beams.

2. Interferometric measuring apparatus according to claim 1 wherein one of the measuring component beams is directed towards a reflecting surface of a first retroreflector on the moving object, the other one of the measuring component beams is directed towards a reflecting surface of a second retroreflector on the moving object, and the first and second retroreflectors are positioned relative to each other so that there is a fixed non-zero path length difference between the two measuring component beams.

3. Interferometric measuring apparatus according to claim 2 wherein the optical axes of the two retroreflectors are co-linear.

4. Interferometric measuring apparatus according to claim 3 wherein one of the retroreflectors comprises reflecting plates mounted on the other retroreflector alongside the reflecting surfaces thereof.

5. Interferometric measuring apparatus according to claim 1 wherein one of the reference component beams is directed towards a first fixed reference reflector, and the other one of the reference component beams is directed towards a second fixed reference reflector, and the two reference reflectors are positioned relative to each other so that there is a fixed known path length difference between the two reference component beams.

6. Interferometric measuring apparatus according to claim 4 wherein the plates are made from a material having a low coefficient of thermal expansion.

7. Interferometric measuring apparatus according to claim 1, wherein the two collimated, coherent light beams are produced from a common laser light source.

8. Interferometric measuring apparatus according to claim 1 wherein:

the detector means includes means for producing an output signal from each of the two output combined beams, and for providing from the output signals a first signal equal to a difference in the output signals and which is related to a change in refractive index of the surrounding atmosphere, and a second signal indicative of a change in at least one of the output signals and which is related to a distance moved by the object.