Semiconductor memory device having surrounding gate transistor
First Claim
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1. A semiconductor memory device comprising:
- a substrate having at least one trench and at least one semiconductor column formed in position adjacent to said trench;
at least one memory cell formed on said substrate, said memory cell being constructed by a trench capacitor and a vertical transistor having a source and drain, said trench capacitor being formed along an inside wall of said trench, with only one electrode of said trench capacitor being formed in the trench, and said vertical transistor being formed in said semiconductor column;
bit line layers and word lines;
wherein a plurality of memory cells are formed on said substrate, a plurality of trench capacitors and a plurality of vertical transistors are arranged in a checkerboard pattern, one electrode of said trench capacitor contacts one of said source and drain of said vertical transistor at only one side of the column, each of said trench capacitors includes a plate electrode formed of said substrate, a storage electrode buried in the trench, and a capacitor insulation film formed between said plate electrode and said storage electrode, and each of said vertical transistors includes a drain region formed in the top portion of said semiconductor column and connected to a corresponding one of said bit line layers, a gate electrode formed on the side surface of said semiconductor column and connected to a corresponding one of said word lines and a source region formed in said semiconductor column below said gate electrode and connected to said storage electrode.
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Abstract
A semiconductor memory device includes at least one memory cell formed on a substrate. The memory cell is constructed by a hole capacitor and a vertical transistor. The hole capacitor is formed in a hole on the substrate. The vertical transistor is formed in a semiconductor column formed in position adjacent to the hole.
191 Citations
7 Claims
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1. A semiconductor memory device comprising:
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a substrate having at least one trench and at least one semiconductor column formed in position adjacent to said trench; at least one memory cell formed on said substrate, said memory cell being constructed by a trench capacitor and a vertical transistor having a source and drain, said trench capacitor being formed along an inside wall of said trench, with only one electrode of said trench capacitor being formed in the trench, and said vertical transistor being formed in said semiconductor column; bit line layers and word lines; wherein a plurality of memory cells are formed on said substrate, a plurality of trench capacitors and a plurality of vertical transistors are arranged in a checkerboard pattern, one electrode of said trench capacitor contacts one of said source and drain of said vertical transistor at only one side of the column, each of said trench capacitors includes a plate electrode formed of said substrate, a storage electrode buried in the trench, and a capacitor insulation film formed between said plate electrode and said storage electrode, and each of said vertical transistors includes a drain region formed in the top portion of said semiconductor column and connected to a corresponding one of said bit line layers, a gate electrode formed on the side surface of said semiconductor column and connected to a corresponding one of said word lines and a source region formed in said semiconductor column below said gate electrode and connected to said storage electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor memory device comprising:
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a substrate having a plurality of trenches and a plurality of semiconductor columns, aid trenches and said semiconductor columns being arranged in a checkerboard pattern; a memory cell array having a plurality of memory cells formed on said substrate, each of said memory cells being constructed by a trench capacitor formed in each of said trenches and a vertical transistor, said vertical transistor being formed in a semiconductor column lying adjacent to said trench capacitor; a plurality of bit line layers which are commonly connected to one of a drain and a source of the vertical transistors; and a plurality of word line layers which are each formed of two word line layer sections, between which each of said semiconductor columns is placed; wherein each of said trench capacitors includes a plate electrode formed of said substrate, a storage electrode buried in the trench, and a capacitor insulation film formed between said plate electrode and said storage electrode, and each of said vertical transistors includes a drain region formed in the top portion of said semiconductor column and connected to a corresponding one of said line layers, a gate electrode formed on the side wall of said semiconductor column and connected to a corresponding one of said word line layers and a source region formed in said semiconductor column below said gate electrode and connected to said storage electrode.
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Specification