Increased wall thickness for robust bond for micromachined sensor

• US 5,520,054 A
• Filed: 03/29/1994
• Issued: 05/28/1996
• Est. Priority Date: 03/29/1994
• Status: Expired due to Term

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: Romo, Mark G.
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/219,398
• Time in Patent Office: 791 Days
• Field of Search: 73/715-720, 73/721-728
• US Class Current: 73/715
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively

Abstract

A micromachined device is described receiving a pressurizable fluid has a plurality of layers bonded together along at least one bond interface, the bond interface having a terminus bordering the pressurizable fluid. In a vicinity of at least one bond interface at least one layer has a shape that reduces a stress magnitude near the bond terminus. In a preferred embodiment a width of at least one layer increases toward the bond interface, to increase the pressure at which the device can operate without fracturing. In another embodiment, both layers bordering the bond interface have widths in the vicinity of the bond interface that increase toward the bond interface. Alternately, the layers have walls shaped such that, for a reference line perpendicular to the bond interface and passing through an end of the bond interface bordering the cavity, the cavity protrudes between the reference line and at least one of the walls.

Claims

1. A micromachined device adapted to receive a pressurized fluid, comprising:

a first layer means; and

a second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus;

wherein one of the first and second layer means defines a pressure sensitive diaphragm and wherein the second layer means has a cavity therein to receive the pressurized fluid and a wall with a wall face bordering the cavity, and wherein in the vicinity of the portion of the bond interface nearest the diaphragm, a vector normal to the wall face extends inwardly into the cavity and away from the plane of the bond interface.

2. The device of claim 1, wherein the second layer means has a wall width in the vicinity of the bond interface that increases toward the bond interface.

3. The device of claim 2, wherein the increase in wall width is continuous with length.

4. The device of claim 2, wherein the increase in wall width is substantially stepwise.

5. The device of claim 4, wherein the substantially stepwise increase in wall width defines a tab having a length in a direction generally parallel to the bond interface and a thickness in a direction generally normal to the bond interface, the tab length being equal to or greater than the tab thickness.

6. The device of claim 1, wherein a geometric angle between the wall face and the bond interface has a value less than 90°

.

7. The device of claim 6, wherein the angle has a value between 5°

and 70°

.

8. The device of claim 1, wherein the cavity protrudes between the wall face and a reference line perpendicular to the bond interface and passing through the terminus.

9. The device of claim 8, wherein the cavity also protrudes between the reference line and a wall face of the first layer proximate the bond interface and facing the cavity.

10. The device of claim 1, further comprising:

third layer means bonded to the second layer means along a second bond interface such that the second layer means is sandwiched between the first and third layers means.

11. The device of claim 10, wherein the second bond interface has a second terminus, and wherein, in a vicinity of the second bond interface, at least one layer means of the second and the third layer means define a wall having a wall width in the vicinity of the second bond interface that increases toward the second bond interface.

12. The device of claim 11, wherein the at least one layer means has a wall face proximate the second bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a reference line perpendicular to the second bond interface and passing through the second terminus.

13. The device of claim 1, wherein the second layer means comprises a material selected from the group consisting of silicon, gallium arsenide, sapphire, ceramic, glass, and quartz.

14. The device of claim 1, further including:

a thin layer of material sandwiched between the first and second layer means.

15. The device of claim 1, further including a pressure-responsive device mechanically coupled at least in part to the second layer means.

16. The device of claim 15, further including measurement circuitry coupled to the pressure-responsive device to provide an indication of pressure.

17. A micromachined device having a cavity therein capable of being pressurized, the device comprising:

a plurality of layer means bonded together along at least one bond interface therebetween;

wherein, one of the plurality of layer means defines a pressure responsive diaphragm, and wherein for each bond interface that borders the cavity, at least one of the plurality of layer means is provided with means for reducing the stress magnitude at an edge of each such bond interface to permit the device to operate at an increased fluid pressure without fracturing.

18. The device of claim 17, wherein the device is at least a portion of a pressure transducer.

19. The device of claim 17, wherein the device comprises 2 layer means.

20. The device of claim 17, wherein the device comprises at least 3 layer means.

21. A micromachined device adapted to receive pressurized fluid, comprising:

first layer means; and

second layer means bonded to the first layer means along a bond interface, the bond interface having a terminus;

wherein the device has a cavity to receive the pressurized fluid, wherein the second layer means has a wall face proximate the bond interface and bordering the cavity, wherein the cavity protrudes between the wall face and a reference line perpendicular to the bond interface and passing through the terminus, and wherein the cavity also protrudes between the reference line and a wall face of the first layer means proximate the bond interface and facing the cavity.

22. A micromachined device adapted to receive pressurized fluid, comprising:

first layer means;

second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and

third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layer means;

wherein in the vicinity of the first bond interface, at least one of the first and second layer means defines a wall having a wall width in the vicinity of the first bond interface that increases toward the first bond interface;

wherein the second bond interface has a second terminus, wherein, in a vicinity of the second bond interface, at least one of the second and third layer means defines a wall having a wall width in the vicinity of the second bond interface that increases toward the second bond interface.

23. A micromachined device adapted to receive pressurized fluid, comprising:

first layer means;

second layer means bonded to the first layer means along a first bond interface, the first bond interface having a first terminus; and

third layer means bonded to the second layer means along a second bond interface such that the second layer means is bonded between the first and third layers means;

wherein the device has a cavity to receive the pressurized fluid, wherein at least one of the first and second layer means has a wall face proximate the first bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a first reference line perpendicular to the first bond interface and passing through the first terminus;

and wherein the second bond interface has a second terminus, wherein at least one of the second and third layer means has a wall face proximate the second bond interface and bordering the cavity, and wherein the cavity protrudes between the wall face and a second reference line perpendicular to the second bond interface and passing through the second terminus.