Magnetic field sensor constructed from a remagnetization line and one magnetoresistive resistor or a plurality of magnetoresistive resistors

• US 5,521,501 A
• Filed: 01/31/1995
• Issued: 05/28/1996
• Est. Priority Date: 06/09/1993
• Status: Expired due to Term

• Current Assignee: Institut Fuer Mikrostrukturtechnologie Und Optoelektronik E.V., Sensitec GmbH
• Original Assignee: Institut Fuer Mikrostrukturtechnologie Und Optoelektronik E.V.
• Inventors: Loreit, Uwe, Dettmann, Fritz
• Primary Examiner(s): O'Shea, Sandra L.
• Assistant Examiner(s): Phillips, Roger
• Application Number:
  US08/374,795
• Time in Patent Office: 483 Days
• Field of Search: 324/207.21, 324/207.12, 324/207.25, 324/207.24, 324/252, 324/173, 324/244, 324/251, 324/207.2, 338/32 R, 338/32 H
• US Class Current: 324/252
• CPC Class Codes: G01R 33/09 Magnetoresistive devices
• CPC Class Codes: G01R 33/096 anisotropic magnetoresistance sensors

Abstract

Described is a sensor based on the magnetoresistive effect and integrated into the thin-film arrangement of a remagnetization line in the form of a meander. In an adaptation to this meandering structure, the magnetoresistive film strips are provided in regions with alternating positive- and negative-inclined Barber pole structures. When periodic remagnetization of the regions takes place, a drift-free AC voltage is obtained as a sensor output signal. This lack of drift is the presupposition for the use of the magnetic field sensor for precise measurement of weak magnetic fields.

Claims

1. A magnetic field sensor, comprising:

a magnetoresistive resistor including at least one magnetoresistive film strip having a longitudinal direction and including a plurality of magnetically separated regions each having a longitudinal direction coinciding with the longitudinal direction of the film strip and being connected one behind the other in the longitudinal direction of the film strip, each said region having a Barber pole structure, the Barber pole structures of the respective regions forming alternatingly positive and negative angles with respect to the longitudinal direction of the film strip; and

a remagnetization line including a highly-conductive thin-film conductor strip having a longitudinal direction forming an angle with the longitudinal direction of the magnetoresistive film strip, being insulated from the film strip, and being disposed in meander form beneath the film strip.

2. The magnetic field sensor according to claim 1, wherein the angle between the longitudinal direction of the magnetoresistive film strips and the highly-conductive thin-film conductor strip is 90°

.

3. The magnetic field sensor according to claim 1, wherein the at least one magnetoresistive film strip comprises a plurality of magnetoresistive film strips which are parallel to one another and are connected in meandering form to form a single resistor.

4. The magnetic field sensor according to claim 1, wherein the at least one magnetoresistive film strip comprises two magnetoresistive film strips arranged parallel to one another, said sensor further comprising:

a conductor extending between the two magnetoresistive film strips resulting in a further meander; and

additional highly-conductive thin-film conductor strips each having a longitudinal direction which coincides with the longitudinal direction of the respective magnetoresistive film strips, the additional highly-conductive thin-film conductor strips being insulated from the remagnetization line and the magnetoresistive film strips.

5. The magnetic field sensor according to claim 1, wherein said at least one magnetoresistive film strip comprises four parallel magnetoresistive film strips each having a plurality of regions having Barber pole structures alternating with positive and negative angles with respect to the longitudinal direction of the magnetoresistive film strip, the magnetoresistive film strips being connected to form a Wheatstone bridge.

6. The magnetic field sensor according to claim 5, wherein each resistor of the Wheatstone bridge comprises a plurality of magnetoresistive film strips.