Probe element for coordinate measurement systems

• US 5,524,354 A
• Filed: 08/18/1994
• Issued: 06/11/1996
• Est. Priority Date: 12/21/1992
• Status: Expired due to Fees

• Current Assignee: CARL Zeiss JENA GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss JENA GmbH (Carl-Zeiss-Stiftung)
• Inventors: Antrack, Torsten, Seydel, Eberhard, Bartzke, Karlheinz
• Primary Examiner(s): Fulton, Christopher W.
• Application Number:
  US08/290,887
• Time in Patent Office: 663 Days
• Field of Search: 33/561, 33/556, 33/557, 33/558, 33/559, 33/560, 73/651, 73/650, 73/649
• US Class Current: 33/561
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor

Abstract

In a probe element for coordinate measuring systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, the probe element has piezo-resonators arranged in a polygonal configuration. Micro-probe elements are arranged in a polygonal configuration on the piezo-resonators and sense inner and outer surfaces in different coordinates. The tactile sensing of the micro-probe elements on the surface of the specimen is effected by measuring the change in the resonance characteristics of the piezo-resonators.

Claims

1. A probe element for coordinate measurement systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, comprising:

a plurality of piezo-resonators being arranged in a polygonal configuration; and

each said piezo resonator having a plurality of microprobe elements arranged in a polygonal configuration which sense inner and outer surfaces in different coordinates, and wherein tactile sensing of the micro-probe elements on the surface of a specimen is effected by means for measuring the change in the resonance characteristics of the piezo-resonators.

2. The probe element according to claim 1, wherein the micro-probe elements are made from diamonds.

3. The probe element according to claim 1, wherein the piezo-resonators are constructed as rod oscillators.

4. The probe element according to claim 1, wherein tuning fork oscillators which are nested one inside the other are used as piezo-resonators, said micro-probe elements being arranged in a polygonal configuration on the tuning fork oscillators.

5. The probe element according to claim 1, wherein piezo-resonators in the form of torsional oscillators are used.

6. The probe element according to claim 1, wherein the piezo-resonators in the form of longitudinal oscillators are used.

7. The probe element according to claim 1, wherein the piezo-resonators are quarter-wave oscillators.

8. The probe element according to claim 3, wherein the piezo-resonator is formed by a plate-shaped element which has three oscillators which are oriented so as to be offset by 120°

.

9. The probe element according to claim 3, wherein the piezo-resonator is formed by a plate-shaped element which has six oscillators which are oriented so as to be offset by 60°

.

10. The probe element according to claim 3, wherein the piezo-resonator is formed by a plate-shaped element which has four oscillators which are oriented so as to be offset by 90°

.

11. The probe element according to claim 3, wherein the passive connection element arranged between the piezo-resonator and micro-probe element narrows in diameter toward the micro-probe elements.

12. The probe element according to claim 1, wherein the micro-probe elements are formed by glass fibers with miniature balls fused to their ends.

13. The probe element according to claims 8, 9 or 10, wherein at least one oscillator is a rod oscillator.

14. The probe element according to claims 8, 9 or 10, wherein at least one oscillator is a tuning fork oscillator.

15. The probe element according to claim 13, wherein all the oscillators are rod oscillators.

16. The probe element according to claim 14, wherein all the oscillators are tuning fork oscillators.

17. The probe element according to claim 13, wherein the oscillators include at least one rod oscillator and at least one tuning fork oscillator.

18. The probe element according to claim 13, wherein the oscillators include at least one rod oscillator and at least one tuning fork oscillator.