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Probe element for coordinate measurement systems

  • US 5,524,354 A
  • Filed: 08/18/1994
  • Issued: 06/11/1996
  • Est. Priority Date: 12/21/1992
  • Status: Expired due to Fees
First Claim
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1. A probe element for coordinate measurement systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, comprising:

  • a plurality of piezo-resonators being arranged in a polygonal configuration; and

    each said piezo resonator having a plurality of microprobe elements arranged in a polygonal configuration which sense inner and outer surfaces in different coordinates, and wherein tactile sensing of the micro-probe elements on the surface of a specimen is effected by means for measuring the change in the resonance characteristics of the piezo-resonators.

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