Probe element for coordinate measurement systems
First Claim
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1. A probe element for coordinate measurement systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, comprising:
- a plurality of piezo-resonators being arranged in a polygonal configuration; and
each said piezo resonator having a plurality of microprobe elements arranged in a polygonal configuration which sense inner and outer surfaces in different coordinates, and wherein tactile sensing of the micro-probe elements on the surface of a specimen is effected by means for measuring the change in the resonance characteristics of the piezo-resonators.
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Abstract
In a probe element for coordinate measuring systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, the probe element has piezo-resonators arranged in a polygonal configuration. Micro-probe elements are arranged in a polygonal configuration on the piezo-resonators and sense inner and outer surfaces in different coordinates. The tactile sensing of the micro-probe elements on the surface of the specimen is effected by measuring the change in the resonance characteristics of the piezo-resonators.
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Citations
18 Claims
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1. A probe element for coordinate measurement systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, comprising:
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a plurality of piezo-resonators being arranged in a polygonal configuration; and each said piezo resonator having a plurality of microprobe elements arranged in a polygonal configuration which sense inner and outer surfaces in different coordinates, and wherein tactile sensing of the micro-probe elements on the surface of a specimen is effected by means for measuring the change in the resonance characteristics of the piezo-resonators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification