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Method of making a pressure transducer apparatus

  • US 5,525,280 A
  • Filed: 04/07/1994
  • Issued: 06/11/1996
  • Est. Priority Date: 11/06/1992
  • Status: Expired due to Fees
First Claim
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1. A method for fabricating a capacitive pressure transducer comprising the steps of:

  • taking granular ceramic powder particles coated with an organic binder and pressing the powder into a flat diaphragm and a relatively thick base having a recess formed in a top surface of the base,applying a metallized layer on a bottom surface of the diaphragm and in the recess in the top surface of the base,placing the diaphragm on the top surface of the base covering the recess,pressing the diaphragm and the base together, without heating, at room temperature with sufficient pressure to adhere the diaphragm to the base to form a unitary unit while leaving open cells in the ceramic powder material,raising the temperature of the unit to a first debinderizing temperature to purge the binder organics from the unit through the open cells thereof, andplacing the unit in a reducing atmosphere and raising the temperature thereof to the sintering temperature of the ceramic, higher than the first temperature, to sinter the ceramic particles together forming a monolithic body and to bond the metallized layers to the ceramic.

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