Microminiature, monolithic, variable electrical signal processor and apparatus including same
First Claim
1. A microminiature, monolithic signal processor, comprising:
- (a) a variable electrical capacitor, comprising;
(i) a substrate,(ii) an electrically conductive member monolithically formed with and spaced from the substrate, the respective plates of the capacitor being the member and the substrate,(iii) means for mounting the member for deflection of a portion thereof toward and away from the substrate and for storing energy when the portion of the member deflects out of a normal position, the stored energy tending to return the deflected portion of the member to the normal position,(iv) a control electrode monolithically formed with the substrate and the member, the electrode being spaced from the member along the direction of deflection of the portion of the member out of the normal position, the control electrode and the member being capable of having impressed therebetween a control signal sufficient to produce a field therebetween to deflect the portion of the member out of its normal position so as to vary the capacitance of the capacitor, and(b) signal means applying a time-varying electrical input signal to the signal processor which said input signal is modulated as a function of the capacitance of said variable capacitor.
1 Assignment
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Accused Products
Abstract
A microminiature, variable electrical device, such as a capacitor (40a), comprises an elemental DMD SLM (40'"'"'), which includes a substrate (43) and a member (145) spaced therefrom and mounted for movement by appropriate facilities (42, 44). A control signal (102) is applied to the movable member (145) to produce an electric field between it and either the substrate (43) or an associated control electrode (46a). The field moves the member (145) toward or away from either the substrate (43) or an associated output electrode (46b) to selectively adjust the spacing therebetween. The field is produced by addressing circuitry (45) associated with the substrate (43). The movable member (145) and either the substrate (43) or the output electrode (46b) function as capacitor plates, and the spacing determines the capacitance thereof. The capacitor (40a) may be placed in series (FIG. 4) or in parallel (FIG. 3) with an input signal (114) applied to the movable member (145). The movable member (145), substrate (43), control electrode (46a), output electrode (46b), addressing circuitry (45), and other elements of the capacitor (40a) comprise a monolithic structure resulting from the use of MOS, CMOS or similar fabrication techniques. Multiple capacitors may be included in transmission lines (FIG. 20), antennae (FIG. 22), couplers (FIG. 21), waveguides FIG. 25) and other apparatus for digital or analog tuning or capacitance adjustment thereof by selective operation of the addressing circuitry (45).
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Citations
130 Claims
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1. A microminiature, monolithic signal processor, comprising:
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(a) a variable electrical capacitor, comprising; (i) a substrate, (ii) an electrically conductive member monolithically formed with and spaced from the substrate, the respective plates of the capacitor being the member and the substrate, (iii) means for mounting the member for deflection of a portion thereof toward and away from the substrate and for storing energy when the portion of the member deflects out of a normal position, the stored energy tending to return the deflected portion of the member to the normal position, (iv) a control electrode monolithically formed with the substrate and the member, the electrode being spaced from the member along the direction of deflection of the portion of the member out of the normal position, the control electrode and the member being capable of having impressed therebetween a control signal sufficient to produce a field therebetween to deflect the portion of the member out of its normal position so as to vary the capacitance of the capacitor, and (b) signal means applying a time-varying electrical input signal to the signal processor which said input signal is modulated as a function of the capacitance of said variable capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82)
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69. A filter network which includes one or more signal processors according to claim I for varying the impedance thereof.
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83. A microminiature, monolithic signal processor, comprising:
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(a) a variable capacitor, comprising; (i) a substrate, (ii) a member monolithically formed with and spaced from the substrate, a region of the substrate and a portion of the member acting as the respective plates of the capacitor, (iii) means for mounting the member for deflection of the portion thereof toward and away from the substrate region and for storing energy when the portion of the member deflects out of a normal position, the stored energy tending to return the deflected portion of the member to the normal position, (iv) means for selectively deflecting the portion of the member out of its normal position to vary the capacitance of the signal processor, and (b) signal means applying a time-varying electrical input signal to the capacitor which said input signal is modulated as a function of the capacitance of said variable capacitor. - View Dependent Claims (84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114)
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115. A microminiature, monolithic signal processor, comprising:
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(a) a variable capacitor, comprising; (i) a substrate, (ii) a microminiature member monolithically formed with and spaced from the substrate, (iii) an electrically conductive region spaced from a portion of the member, the region and the portion of the member acting as the respective plates of a parallel plate capacitor, (iv) means for mounting the member for deflection of the portion thereof toward and away from the region and for storing energy when the portion of the member deflects out of a normal position toward the region, the stored energy tending to return the deflected portion of the member to the normal position, (v) means for selectively deflecting the portion of the member out of its normal position toward the region to vary the capacitance of the capacitor, and (b) signal means applying a time-varying electrical input signal to the capacitor which said input signal is modulated as a function of the capacitance of said variable capacitor. - View Dependent Claims (116)
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117. A microminiature, monolithic device, which comprises:
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a substrate, a movable member which in a first normal position affects an input signal in a first mode and which affects the input signal in a second mode when not in the first position, means for mounting the member at a location spaced from the substrate for movement of the member toward and away from the substrate and for storing energy when the member moves out of the first position, the stored energy biasing the member toward the first position, means applying a time-varying electrical said input signal to the device, means for selectively applying a control signal to the member, and means responsive to the control signal for selectively moving the member out of the normal position to selectively alter the mode in which the member affects the input signal. - View Dependent Claims (118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130)
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Specification