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Digital flexure beam accelerometer and method

  • US 5,526,688 A
  • Filed: 04/26/1994
  • Issued: 06/18/1996
  • Est. Priority Date: 10/12/1990
  • Status: Expired due to Term
First Claim
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1. A structure for detecting acceleration comprising the following:

  • a substrate;

    readout circuitry formed in said substrate;

    an electrical contact formed on said substrate and in communication with said readout circuitry;

    a shield plane on said substrate surrounding said electrical contact;

    at least one support structure formed on said substrate;

    a first layer of metal supported by said at least one support structure, said first layer of metal forming hinges; and

    an inertial mass supported by said hinges, said inertial mass formed from a second layer of metal and located opposite said substrate from said electrical contact, wherein when said structure is subjected to an acceleration said inertial mass is deflected toward said substrate until said inertial mass contacts said electrical contact, said contact between said inertial mass and said electrical contact detected by said readout circuitry.

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