Systematic method for production of phase-shifting photolithographic masks

• US 5,527,645 A
• Filed: 11/17/1994
• Issued: 06/18/1996
• Est. Priority Date: 04/21/1993
• Status: Expired due to Term

• Current Assignee: Synopsys Merger Holdings LLC (Synopsys Incorporated)
• Original Assignee: Thomas Kailath, Yagyensh C. Pati
• Inventors: Pati, Yagyensh C., Kailath, Thomas
• Primary Examiner(s): ROSASCO, STEPHEN D
• Application Number:
  US08/340,811
• Time in Patent Office: 579 Days
• Field of Search: 430/5, 430/22, 430/321, 430/322
• US Class Current: 430/5
• CPC Class Codes: G03F 1/28 with three or more diverse phases on the same PSM; Preparation thereof

Abstract

A systematic method of producing a mask for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of the mask positioned in an object plane and in which an image is formed on an image plane is disclosed herein. The method includes the steps of defining a binary image pattern to be formed by the illumination system on the image plane; generating a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on the transmission function and the binary image pattern; transforming the mask function into a quadrature-phase mask function by dividing the continuously-varying phase into four phase levels; and generating the mask in accordance with the quadrature-phase mask function, wherein the mask includes a plurality of pixel regions each of which has a transmittance corresponding to one of the four phase levels.

Claims

1. A systematic method of producing a mask for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of said mask positioned in an object plane and in which an image is formed on an image plane, comprising the steps of:

formulating a coherent approximation of said transmission function;

defining a binary image pattern to be formed by said illumination system on said image plane;

generating a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on said coherent approximation of said transmission function and said binary image pattern;

transforming said mask function into a quadrature-phase mask function by dividing said continuously-varying phase into four phase levels;

generating said mask in accordance with said quadrature-phase mask function, said mask including a plurality of pixel regions wherein each pixel region has a transmittance corresponding to one of said four phase levels.

2. The method of claim 1 wherein

said formulating step formulates said coherent approximation as a weighted superposition of transmission functions associated with one or more coherent illumination systems;

and

said step of generating a continuous mask function further includes the step of formulating an error function indicative of intensity difference between areas of said desired image pattern and corresponding areas of image patterns formed on the basis of said continuous mask function.

3. The method of claim 1, wherein

said continuous mask function includes a real part and an imaginary part;

said transforming step includes transforming said real part of said continuous mask function into a first two-phase mask function having two phase levels and transforming said imaginary part of said continuous mask function into a second two-phase mask function having two phase levels; and

said step of generating said mask includes generating a first mask in accordance with said first two-phase mask function and generating a second two-phase mask in accordance with said second two-phase mask function, said first mask including a plurality of first pixel regions wherein each first pixel region has a transmittance corresponding to one of said two phase levels, said second mask including a plurality of second pixel regions wherein each second pixel region has a transmittance corresponding to one of said two phase levels.

4. A systematic method of producing masks for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of said masks positioned in an object plane and in which an image is formed on an image plane, comprising the steps of:

formulating a coherent approximation of said transmission function;

defining a binary image pattern to be formed by said illumination system on said image plane;

generating a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on said coherent approximation of said transmission function and said binary image pattern, said continuous mask function including a real part and an imaginary part;

transforming said real part of said continuous mask function into a first two-phase mask function having two phase levels and transforming said imaginary part of said continuous mask function into a second two-phase mask function having two phase levels; and

generating a first mask in accordance with said first two-phase mask function and generating a second two-phase mask in accordance with said second two-phase mask function, said first mask including a plurality of first pixel regions wherein each first pixel region has a transmittance corresponding to one of said two phase levels, said second mask including a plurality of second pixel regions wherein each second pixel region has a transmittance corresponding to one of said two phase levels.

5. The method of claim 4 wherein said step of generating a continuous mask function further includes the step of formulating an error function indicative of intensity difference between areas of said desired image pattern and corresponding areas of image patterns formed on the basis of said continuous mask function.

6. A system for producing masks for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of said masks positioned in an object plane and in which an image is formed on an image plane, comprising the steps of:

a computer system, including;

a computer memory in which is stored data representing a coherent approximation of said transmission function, and data representing a binary image pattern to be formed by said illumination system on said image plane;

a first mask generation program that generates a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on said coherent approximation of said transmission function and said binary image pattern; and

a second mask generation program that transforms said mask function into a quadrature-phase mask function by dividing said continuously-varying phase into four phase levels; and

mask fabrication equipment that generates said mask in accordance with said quadrature-phase mask function, said mask including a plurality of pixel regions wherein each pixel region has a transmittance corresponding to one of said four phase levels.

7. The system of claim 6 wherein said predetermined error criteria utilized by said first mask generation program include evaluation of an error function indicative of intensity difference between areas of said desired image pattern and corresponding areas of image patterns formed on the basis of said continuous mask function.

8. The system of claim 7, wherein

said continuous mask function includes a real part and an imaginary part;

said second mask generation program transforms said real part of said continuous mask function into a first two-phase mask function having two phase levels and transforms said imaginary part of said continuous mask function into a second two-phase mask function having two phase levels; and

said mask fabrication equipment generates a first mask in accordance with said first two-phase mask function and generates a second two-phase mask in accordance with said second two-phase mask function, said first mask including a plurality of first pixel regions wherein each first pixel region has a transmittance corresponding to one of said two phase levels, said second mask including a plurality of second pixel regions wherein each second pixel region has a transmittance corresponding to one of said two phase levels.

9. The system of claim 6, wherein

said continuous mask function includes a real part and an imaginary part;

said second mask generation program transforms said real part of said continuous mask function into a first two-phase mask function having two phase levels and transforms said imaginary part of said continuous mask function into a second two-phase mask function having two phase levels; and

said mask fabrication equipment generates a first mask in accordance with said first two-phase mask function and generates a second two-phase mask in accordance with said second two-phase mask function, said first mask including a plurality of first pixel regions wherein each first pixel region has a transmittance corresponding to one of said two phase levels, said second mask including a plurality of second pixel regions wherein each second pixel region has a transmittance corresponding to one of said two phase levels.

10. A system for producing masks for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of said masks positioned in an object plane and in which an image is formed on an image plane, comprising the steps of:

a computer system, including;

a computer memory in which is stored data representing a coherent approximation of said transmission function, and data representing a binary image pattern to be formed by said illumination system on said image plane;

a first mask generation program that generates a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on said coherent approximation of said transmission function and said binary image pattern, said continuous mask function including a real part and an imaginary part; and

a second mask generation program that transforms said real part of said continuous mask function into a first two-phase mask function having two phase levels and transforming said imaginary part of said continuous mask function into a second two-phase mask function having two phase levels; and

mask fabrication equipment that generates a first mask in accordance with said first two-phase mask function and generates a second two-phase mask in accordance with said second two-phase mask function, said first mask including a plurality of first pixel regions wherein each first pixel region has a transmittance corresponding to one of said two phase levels, said second mask including a plurality of second pixel regions wherein each second pixel region has a transmittance corresponding to one of said two phase levels.

11. The system of claim 10, wherein said predetermined error criteria utilized by said first mask generation program include evaluation of an error function indicative of intensity difference between areas of said desired image pattern and corresponding areas of image patterns formed on the basis of said continuous mask function.

12. A systematic method of producing a mask for use within a photolithographic illumination system characterized by a transmission function in which light is transmitted through non-opaque portions of said mask positioned in an object plane and in which an image is formed on an image plane, comprising the steps of:

formulating a coherent approximation of said transmission function;

defining a binary image pattern to be formed by said illumination system on said image plane;

generating a continuous mask function of continuously-varying phase which satisfies predetermined error criteria based on said coherent approximation of said transmission function and said binary image pattern;

transforming said mask function into a plural-phase mask function by dividing said continuously-varying phase into a plurality of phase levels;

generating said mask in accordance with said plural-phase mask function, said mask including a plurality of pixel regions wherein each pixel region has a transmittance corresponding to one of said plurality of phase levels.

13. The method of claim 12 wherein said step of generating a continuous mask function further includes the step of formulating an error function indicative of intensity difference between areas of said desired image pattern and corresponding areas of image patterns formed on the basis of said continuous mask function.