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Thermal desorption gas spectrometer

  • US 5,528,032 A
  • Filed: 03/22/1994
  • Issued: 06/18/1996
  • Est. Priority Date: 03/23/1993
  • Status: Expired due to Term
First Claim
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1. A thermal desorption gas spectrometer comprising:

  • a vacuum chamber;

    a vacuum pump which maintains said vacuum chamber at a vacuum;

    a sample stage positioned within said vacuum chamber;

    a heater which heats a sample placed on said sample stage;

    a mass spectrometer positioned within said vacuum chamber to detect gas which desorbs from said sample; and

    a processing circuit which receives an electrical signal output by said mass spectrometer, said processing circuit including;

    recording means which continuously records, for each mass of a detected substance, an intensity of said electrical signal as a function of at least one of temperature and elapsed time from a start of heating of said sample to a temperature at which an amount of desorbed gas from said sample becomes extremely small; and

    integration means which integrates said intensity of said electrical signal with respect to said function of said at least one of temperature and elapsed time for each mass of said detected substance, and which displays a number of molecules of said detected substances which have adsorbed onto a surface of said sample based on a ratio of said integration of said intensity of said electrical signal to a reference value.

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