Magnetic field detection
First Claim
1. A semi-conductor device comprising:
- a substrate comprising a single crystal silicon layer of N- type and having a thickness of 0.3 to 0.5 microns;
a first region of N+ type on said substrate;
second and third regions of said N+ type on said substrate and spaced from each other and from said first region;
a fourth region of P+ type on said substrate interposed between said first region and said second and third regions and defining a bifurcated channel of said N+ type extending from said first region to each of said second and third regions; and
conductive elements connected to said regions.
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Accused Products
Abstract
A solid state triode employs the Hall effect to asymmetrically proportion flow of current through different branches of a number of cascaded bifurcated N- charge carrier channels (10,18,20), thereby providing an indication of strength and direction of an applied magnetic field by measuring magnitude and sense of the difference between currents flowing in the two channel branches (14,16,24,26,30,32). The solid state triode is formed on an silicon-on-insulator (SOI) substrate (47,48,49) in which an N+ source region (54) and at least two end N+ drain regions (56,58) are interconnected by an N- charge carrier channel (60) that is defined by a plurality of P+ regions (64a,64b,64c,64d) in a thin single crystal silicon substrate (49) between the source and drain regions (54,56,58). A polysilicon gate (52) overlies the N- channel and acts as a self-aligning mask during manufacture of the triode to precisely align the N+ and P+ doping to the polysilicon gate configuration. The SOI has a very thin N- doped layer to which the N+ and P+ doping is applied in steps of successively different energy levels so that the doping extends completely through the N- layer and is uniform throughout the thickness of the layer. The N- channel is narrow and has a width at least twice the thickness of the crystal silicon uppermost layer of the SOI substrate.
69 Citations
22 Claims
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1. A semi-conductor device comprising:
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a substrate comprising a single crystal silicon layer of N- type and having a thickness of 0.3 to 0.5 microns; a first region of N+ type on said substrate; second and third regions of said N+ type on said substrate and spaced from each other and from said first region; a fourth region of P+ type on said substrate interposed between said first region and said second and third regions and defining a bifurcated channel of said N+ type extending from said first region to each of said second and third regions; and conductive elements connected to said regions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A solid state magnetic field detector comprising;
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a substrate having a source region, and first and second drain regions spaced from each other and from said source region, wherein said substrate comprises a silicon-on-insulator body having a silicon layer with a thickness of 0.3 to 0.5 microns and being doped with a first type of impurity at a first doping level, and said source and drain regions comprise areas of said silicon layer doped with said first type of impurity at a second doping level which is higher than said first doping level; and a bifurcated charge carrier channel connecting said source region with each of said drain regions wherein said silicon layer is doped with a second type of impurity along and on opposite sides of said channel. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification