Guideless stage with isolated reaction stage

• US 5,528,118 A
• Filed: 04/01/1994
• Issued: 06/18/1996
• Est. Priority Date: 04/01/1994
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Precision Incorporated (Nikon Corporation)
• Inventors: Lee, Martin E.
• Primary Examiner(s): Sircus, Brian
• Application Number:
  US08/221,375
• Time in Patent Office: 809 Days
• Field of Search: 318/560-575, 318/640, 318/38, 318/135, 74/479.01, 74/480 R, 74/490.07-.1, 108/137-148, 248/638, 248/651, 248/656, 248/657, 269/55, 269/56, 269/58, 269/71, 250/492.1, 250/492.2, 250/492.22
• US Class Current: 318/568.17
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70
• CPC Class Codes: Y10T 74/20207 Multiple controlling elements for single controlled element

Abstract

A guideless stage for aligning a wafer in a microlithography system is disclosed, and a reaction frame is disclosed which isolates both external vibrations as well as vibrations caused by reaction forces from an object stage. In the guideless stage an object stage is disclosed for movement in at least two directions and two separate and independently movable followers move and follow the object stage and cooperating linear force actuators are mounted on the object stage and the followers for positioning the object stage in the first and second directions. The reaction frame is mounted on a base structure independent of the base for the object stage so that the object stage is supported in space independent of the reaction frame. At least one follower is disclosed having a pair of arms which are respectively movable in a pair of parallel planes with the center of gravity of the object stage therebetween. The linear positioning forces of the actuator drive means are mounted and controlled so that the vector sum of the moments of force at the center of gravity of the object stage due to the positioning forces of the drive means is substantially equal to zero. The actuator mounting means can include at least two thin flexible members mounted in series with the primary direction of flex of the members being orthogonal to one another.

Claims

1. A stage assembly comprising:

a base;

a stage slidably movable on the base;

a reaction frame laterally surrounding the stage and supported independently of the base;

a first follower frame slidably movable on the reaction frame in a first direction; and

a second follower frame slidably movable on the reaction frame in a second direction orthogonal to the first direction;

wherein the stage is slidably movable along the first follower frame in the second direction and along the second follower frame in the first direction.

2. The stage assembly of claim 1, further comprising cooperating linear actuator elements mounted on the stage and on each of the first and second follower frames for positioning the stage along the first and second follower frames.

3. The stage assembly of claim 1, wherein a vector sum of the moments of force at the center of gravity of the stage due to positioning forces of the linear actuator elements mounted on the stage is substantially equal to zero.

4. The stage assembly of claim 1, wherein the first follower frame includes two-spaced apart arms located respectively in two parallel planes, with the center of gravity of the stage being therebetween.

5. The stage assembly of claim 1, further comprising two spaced-apart linear actuator elements mounted on the stage and cooperating with two linear actuator elements mounted on the first follower frame for positioning the stage along the first follower frame, and at least one linear actuator element mounted on the stage cooperating with one linear actuator element mounted on the second follower frame for positioning the stage along the second follower frame.

6. The stage assembly of claim 1, further comprising a projection optical system for projecting an image onto the stage and being mounted to the base, and isolated mechanically from the reaction frame.

7. The stage assembly of claim 2, wherein each of the linear actuator elements mounted on the stage is a coil cooperating with a magnetic track mounted on one of the first and second follower frames, at least one of the coils being mounted to the stage by a double flexure including a first flexure element coupled to a perpendicularly arranged second flexure element, thereby reducing vibration.

8. The stage assembly of claim 1, further comprising a positioning system including:

a first sensor for sensing a position of the stage in the first direction and a second sensor for sensing a position of the stage in the second direction;

first means for driving the first follower frame on the reaction frame in the first direction;

second means for driving the second follower frame on the reaction frame in the second direction; and

means for controlling the first and second means for driving, in response to the sensed positions of the stage, wherein the means for controlling moves the first and second follower frames to within a predetermined distance of the stage, and without any direct physical contact between the stage and the first and second follower frames.

9. A method of positioning a stage on a base, comprising the steps of:

slidably driving the stage along each of two orthogonally arranged follower frames;

slidably driving both the follower frames relative to the base; and

supporting the follower frames independently of the base, thereby isolating the stage from reaction forces caused by the steps of driving.

10. An exposure apparatus for projecting a predetermined pattern image formed by a projection system onto a surface of a substrate supported on a stage member which is movable in two directions, said apparatus comprising:

(a) a base member for supporting said stage member to move in first and second directions on said base member;

(b) a column structure for holding said projection system and said base member together;

(c) an isolation assembly for supporting said column structure on a foundation;

(d) a reaction frame structure disposed around said base member and supported on said foundation independently from said isolation assembly;

(e) a first drive actuator for supplying a driving force to said stage member without contact, to move said stage member in the first direction on said base member, said first drive actuator being mounted to said reaction frame structure movably in the second direction; and

(f) a second drive actuator for moving said first drive actuator in the second direction on said reaction frame structure so as to follow movement of said stage member in the second direction on said base member.

11. An exposure apparatus according to claim 10, wherein said first drive actuator includes at least one linear motor having a first magnetizing unit fixedly mounted to said stage member and a second magnetizing unit provided on said reaction frame structure movably in the second direction, wherein said first and second magnetizing units interact with each other in a magnetic field.

12. An exposure apparatus according to claim 11, wherein said second drive actuator includes a linear motor having a third magnetizing unit fixedly mounted to said reaction frame structure and a fourth magnetizing unit fixedly connected to said second magnetizing unit.

13. An exposure apparatus according to claim 10, wherein said reaction frame structure includes a linear guide portion extending along the second direction, a movable frame member guided by said linear guide portion movably in the second direction within an upper space of said base member, and wherein said second drive actuator moves said movable frame member in the second direction.

14. An exposure apparatus according to claim 13, wherein said first drive actuator includes at least one linear motor having a first magnetizing unit fixedly mounted to said stage member and a second magnetizing unit fixedly mounted to said movable frame member so as to move relatively in the first direction.