Probe card changer system and method

• US 5,528,158 A
• Filed: 04/11/1994
• Issued: 06/18/1996
• Est. Priority Date: 04/11/1994
• Status: Expired due to Term

• Current Assignee: Xandex, Inc.
• Original Assignee: Xandex, Inc.
• Inventors: Sinsheimer, Roger, Richards, Tom
• Primary Examiner(s): Karlsen, Ernest F.
• Assistant Examiner(s): KOBERT, RUSSELL MARC
• Application Number:
  US08/226,154
• Time in Patent Office: 799 Days
• Field of Search: 324/754, 324/755, 324/757, 324/758
• US Class Current: 324/750.22
• CPC Class Codes: G01R 1/07314 the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support on an elastic support, e.g. a film, G01R1/0735

Abstract

A prober tester interface system and a method for loading a probe card into a prober. The interface system includes a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes. A theta ring for holds the stiffener in the prober, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders. A loader is coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes. A theta drive assembly is coupled to the theta ring for rotating the theta ring to align the probe card with the test head. In a specific embodiment, the test head includes a contactor, and the theta ring includes a plurality of clamp cylinders for locking the contactor in theta and Z while a probe card is being loaded or unloaded.

Claims

1. A prober to test head interface, comprising:

a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes;

a theta ring for holding the stiffener, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders;

a loader coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes; and

a theta drive assembly coupled to the theta ring for rotating the theta ring to align the probe card with the test head.

2. The prober to test head interface of claim 1 wherein the test head comprises a contactor, and the theta ring comprises a plurality of clamp cylinders for locking the contactor in theta and Z while a probe card is being loaded or unloaded.

3. The prober to test head interface of claim 2 wherein the stiffener comprises third alignment holes for engaging pins on the contactor.

4. The prober to test head interface of claim 1 wherein the stiffener comprises a memory for storing operational data regarding the probe card.

5. The prober to test head interface of claim 4 wherein the operational data comprises a previous theta location for the probe card, and the theta drive assembly comprises a motorized belt drive, the motorized belt drive having a position feedback mechanism which the motorized belt drive employs to rotate the theta ring and position the probe card at the previous theta location.

6. The prober to test head interface of claim 4 wherein the memory comprises a touch memory positioned on the underside of the stiffener.

7. The prober to test head interface of claim 6 wherein the loader further comprises a memory reader for contacting the touch memory and reading the operational data stored therein.

8. The prober to test head interface of claim 1 wherein the loader moves the stiffener in first and second directions, the first direction being substantially parallel to a plane formed by the upper surface of the stiffener, and the second direction being substantially perpendicular to the plane, thereby facilitating the loading and unloading of probe cards in the prober.

9. The prober to test head interface of claim 1 wherein the loader comprises an arm assembly, the arm assembly comprising:

a shoulder coupled to the prober providing pitch, roll, and Z adjustments;

an articulated arm coupled to the shoulder comprising a plurality of segments;

a hand coupled to the arm for holding the stiffener, the second alignment pins being located on the hand;

a handle coupled to the arm facilitating manual manipulation of the arm assembly, and thereby positioning of the stiffener in the prober.

10. The prober to test head interface of claim 9 wherein the handle comprises at least one docking receptacle, and the interface further comprises at least one docking pin for engaging the at least one docking receptacle when the probe card and stiffener are in position beneath the theta ring.

11. The prober to test head interface of claim 10 wherein the at least one docking pin comprises a docking sensor for generating a signal when the at least one docking pin and the at least one docking receptacle are engaged.

12. The prober to test head interface of claim 1 wherein the loader comprises an arm assembly coupled to the prober for moving the stiffener in first and second directions, the first direction being substantially parallel to a plane defined by the upper surface of the stiffener, and the second direction being substantially perpendicular to the plane, the arm assembly comprising:

a Z mechanism coupled to the prober;

a first slide assembly coupled to the Z mechanism;

a first air cylinder coupled to the first slide assembly;

a second slide assembly coupled to the first air cylinder;

a second air cylinder coupled to the second slide assembly; and

a hand coupled to the second air cylinder for holding the stiffener, the second alignment pins being located on the hand;

wherein the first air cylinder moves the second slide assembly with respect to the first slide assembly in the first direction, the second air cylinder moves the hand with respect to the second slide assembly in the first direction to a position directly below the theta ring, and the Z mechanism moves the arm assembly in the second direction, thereby causing the first alignment holes to engage the first alignment pins on the theta ring.

13. The prober to test head interface of claim 12 wherein the arm assembly is positioned in a magazine frame comprising at least one docking receptacle, and the interface further comprises at least one docking pin for engaging the at least one docking receptacle.

14. A prober to test head interface, comprising:

a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes;

a theta ring for holding the stiffener, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders;

a loader coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes, the loader comprising;

an articulated arm coupled to the prober comprising a plurality of segments;

a hand coupled to the arm for holding the stiffener, the second alignment pins being located on the hand; and

a handle coupled to the arm facilitating manual manipulation of the arm assembly, and thereby positioning of the stiffener in the prober; and

a theta drive assembly coupled to the theta ring for rotating the theta ring to align the probe card with the test head.

15. The prober to test head interface of claim 14 wherein the handle comprises at least one docking receptacle, and the interface further comprises at least one docking pin for engaging the at least one docking receptacle when the probe card and stiffener are in position beneath the theta ring.

16. The prober to test head interface of claim 15 wherein the at least one docking pin comprises a docking sensor for generating a signal when the at least one docking pin and the at least one docking receptacle are engaged.

17. The prober to test head interface of claim 14 wherein the stiffener comprises a memory for storing operational data regarding the probe card.

18. The prober to test head interface of claim 17 wherein the operational data comprises a previous theta location for the probe card, and the theta drive assembly comprises a motorized belt drive, the motorized belt drive having a position feedback mechanism which the motorized belt drive employs to rotate the theta ring and position the probe card at the previous theta location.

19. The prober to test head interface of claim 17 wherein the memory comprises a touch memory positioned on the underside of the stiffener.

20. The prober to test head interface of claim 19 wherein the hand further comprises a memory reader for contacting the touch memory and reading the operational data stored therein.

21. The prober to test head interface of claim 14 wherein the test head comprises a contactor, and the theta ring comprises a plurality of clamp cylinders for locking the contactor in theta while a probe card is being loaded or unloaded.

22. The prober to test head interface of claim 21 wherein the stiffener comprises third alignment holes for engaging pins on the contactor.

23. A method for loading a stiffener into a prober and aligning a probe card with a test head, the stiffener holding the probe card and having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes, the method comprising the steps of:

engaging the first alignment holes in the stiffener with first alignment pins on a theta ring, thereby positioning the stiffener in the theta ring;

engaging the recesses with a plurality of lock cylinders, thereby forcing the upper surface of the stiffener against a machined lip in the theta ring; and

rotating the theta ring to align the probe card with the test head.

24. The method of claim 23, further comprising the steps of:

manually moving an articulated arm to a working position, the articulated arm comprising a hand having a plurality of second alignment pins;

manually placing the stifleher on the hand, thereby engaging the second alignment holes with the second alignment pins;

manually manipulating the articulated arm to position the stiffener under the theta ring; and

moving the stiffener up into the theta ring.

25. The method of claim 24 wherein the stiffener comprises a touch memory, and the articulated arm comprises a memory reader, the step of manually placing the stiffener on the hand causing the touch memory to come in contact with the memory reader, the method further comprising the step of polling the touch memory with the memory reader to read and write operational data regarding the probe card.

26. The method of claim 23, further comprising the steps of:

moving a hand in first and second directions to engage the second alignment holes in the stiffener with second alignment pins on the hand, the stiffener being positioned outside the prober, the first direction being substantially parallel to a plane defined by the upper surface of the stiffener, and the second direction being substantially perpendicular to the plane;

moving the hand in the first direction to position the stiffener under the theta ring; and

moving the hand in the second direction, thereby causing the first alignment holes to engage the first alignment pins on the theta ring.

27. The method of claim 26 wherein the stiffener comprises a touch memory, and is initially positioned on a first shelf in a rack having a plurality of shelves, each shelf for storing a stiffener, each shelf having a memory reader, the method further comprising the steps of:

removing the stiffener from the theta ring;

moving the hand and the stiffener in the first and second directions to position the stiffener on the first shelf, thereby causing the touch memory to come in contact with the memory reader; and

polling the touch memory with the memory reader to read and write operational data regarding the probe card.

28. The method of claim 23 wherein the step of rotating the theta ring comprises employing a position feedback mechanism to rotate the theta ring to a previous theta position for the probe card, the previous theta position being stored in a touch memory associated with the probe card.