Image scanning apparatus and method

• US 5,528,359 A
• Filed: 07/25/1994
• Issued: 06/18/1996
• Est. Priority Date: 07/30/1993
• Status: Expired due to Fees

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Taguchi, Hiromichi
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US08/279,873
• Time in Patent Office: 694 Days
• Field of Search: 356/241, 356/237, 356/378, 356/384
• US Class Current: 356/237.6
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination

Abstract

An image scanning apparatus and method for automatically inspecting a product having light transmission regions, so as to detect any defect therein with accuracy and rapidity. The image scanning method inspects the product by disposing a light source on one side of the product and an optical sensor on the other side thereof, varying the incidence angle of a light output emitted from the light source to the light transmission regions of the product, then receiving, by the optical sensor, the light transmitted through the light transmission regions at each of the varied incidence angles, thereby acquiring image data with regard to the product, and detecting any defect in the product on the basis of the image data thus obtained at the incidence angles. The image scanning apparatus comprises a light source disposed on one side of the product to be inspected, an optical sensor disposed on the other side thereof, a means for varying the incidence angle of a light output emitted from the light source to the light transmission regions of the product, and a means for processing the image data obtained with regard to the product at each of the varied incidence angles.

Claims

1. An image scanning method for automatically inspecting a product having light transmission regions, comprising the steps of:

disposing a light source on one side of said product, while disposing an optical sensor on the other side of said product;

sequentially varying the incidence angle of a light output emitted from said light source and caused to be incident upon a plurality of the light transmission regions of said product simultaneously at each angle;

receiving, by said optical sensor, the light transmitted through the light transmission regions of said product at each of the varied incidence angles, thereby acquiring image data at each of said incidence angles with regard to said product;

obtaining a composite image data from the image data acquired at each of said incidence angles;

differentiating light distribution intensities in said composite image data to recognize the edges of the light transmission regions; and

detecting any defect of said product on the basis of an examination of said edges of the light transmission regions.

2. The image scanning method according to claim 1, wherein said light source is displaced relatively to the light transmission regions of said product for varying the incidence angle of the light output emitted from said light source to the light transmission regions of said product.

3. The image scanning method according to claim 2, wherein said optical sensor is displaced in compliance with the relative displacement of said light source to the light transmission regions of said product.

4. The image scanning method according to claim 1, 2 or 3, wherein said optical sensor consists of a single one-dimensional line sensor.

5. The image scanning method according to claim 1, 2 or 3, wherein said optical sensor consists of a plurality of one-dimensional line sensors.

6. The image scanning method according to claim 1, 2 or 3, wherein said optical sensor consists of a two-dimensional line sensor.

7. An image scanning apparatus for automatically inspecting a product having light transmission regions, comprising:

a light source disposed on one side of said product;

an optical sensor disposed on the other side of said product;

an incidence angle varying means for sequentially varying the incidence angle of a light output emitted from said light source to a plurality of the light transmission regions of said product simultaneously at each angle; and

an image data processing means for processing the image data obtained with regard to said product by said optical sensor which receives the light transmitted through the light transmission regions of said product at each of the varied incidence angles.

8. The image scanning apparatus according to claim 7, wherein said incidence angle varying means is a light source moving mechanism which displaces said light source relatively to the light transmission regions of said product.

9. The image scanning apparatus according to claim 8, wherein a sensor moving mechanism is provided for displacing said optical sensor in compliance with the relative displacement of said light source to the light transmission regions of said product.

10. An image scanning apparatus for automatically inspecting a product having light transmission regions, comprising:

a plurality of light sources disposed on one side of said product and emitting light outputs therefrom at mutually different incidence angles to a plurality of the light transmission regions of said product simultaneously;

an optical sensor disposed on the other side of said product; and

an image data processing means for processing the image data obtained with regard to said product by said optical sensor which receives the light transmitted through the light transmission regions of said product at each of said different incidence angles,

obtains a composite image data from the image data acquired at each of said incidence angles, differentiates light distribution intensities in said composite image data to recognize the edges of the light transmission regions, and detects any defect in said product on the basis of an examination of said edges of the light transmission regions.

11. The image scanning apparatus according to any of claims 7 to 10, wherein said optical sensor consists of a single one-dimensional line sensor.

12. The image scanning apparatus according to any of claims 7 to 10, wherein said optical sensor consists of a plurality of one-dimensional line sensors.

13. The image scanning apparatus according to any of claims 7 to 10, wherein said optical sensor consists of a two-dimensional line sensor.