Micro-miniaturized, electrostatically driven diaphragm micropump
First Claim
1. An electrostatically driven micropump comprising first and second electrically conductive electrode areas, each of said electrode areas being shaped to form at least part of a pump body, the second pump body having a diaphragm region, the electrode areas also being adapted to be connected to a voltage source and being electrically insulated from one another, said pump bodies defining together a hollow space bordering on the diaphragm region, the hollow space being filled with a fluid medium which is spatially separated from the fluid to be pumped, anda pump chamber with a flow direction control means and having a flow resistance Which depends on the flow direction of the fluid to be pumped, wherein said pump chamber borders on a side of said diaphragm region facing away from said hollow space.
1 Assignment
0 Petitions
Accused Products
Abstract
An electrostatically driven diaphragm micropump comprises a first pump bodys a counterelectrode and a second pump body having a diaphragm region. The two pump bodies establish a hollow space bordering on the diaphragm region and are electrically insulated from each other. The hollow space is filled with a medium different from the fluid to be pumped. The pump bodies may consist of a semiconductor material of different types of charge. The medium in the hollow space preferably has a high dielectric constant.
-
Citations
25 Claims
-
1. An electrostatically driven micropump comprising first and second electrically conductive electrode areas, each of said electrode areas being shaped to form at least part of a pump body, the second pump body having a diaphragm region, the electrode areas also being adapted to be connected to a voltage source and being electrically insulated from one another, said pump bodies defining together a hollow space bordering on the diaphragm region, the hollow space being filled with a fluid medium which is spatially separated from the fluid to be pumped, and
a pump chamber with a flow direction control means and having a flow resistance Which depends on the flow direction of the fluid to be pumped, wherein said pump chamber borders on a side of said diaphragm region facing away from said hollow space.
Specification