Micromachined rate sensor comb drive device and method

• US 5,530,342 A
• Filed: 09/30/1994
• Issued: 06/25/1996
• Est. Priority Date: 09/30/1994
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Rockwell International Corporation
• Inventors: Murphy, Hugh J.
• Primary Examiner(s): Karlsen, Ernest F.
• Assistant Examiner(s): Kobert, Russell M.
• Application Number:
  US08/315,471
• Time in Patent Office: 634 Days
• Field of Search: 73/505, 73/510, 73/517 AV, 324/158.1, 324/772
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A micromachined rate sensor system includes plural sensing proof masses or plates coupled to multiple electrostatic combs. A comb drive amplifier induces a deflection of the sense plates along a plane defined by the configuration of the sense plates, such that the sensed rotational rate causes an out-of-plane force to act on the sense plates. The motor combs are driven at half NRF by coupling a comb drive amplifier to a half frequency motor oscillator comprising a digital "divide by 2" flip flop, a low pass filter, a multiplier, and a plurality of signal amplifiers. The half frequency oscillator provides the drive voltage at one-half the NRF. Accordingly, embodiments of the present invention eliminate undesirable parasitic drive feedthrough at the motor frequency, thus providing for increased efficiency.

Claims

1. A system for sensing rotation rate while eliminating drive voltage coupling, the system operable with a drive voltage, wherein parasitic drive voltage attributable to undesirable feedthrough of the drive voltage back into the sensing system is minimized, comprising:

at least one proof mass;

at least one spring coupled to the proof mass, the spring and proof mass assembly being responsive to unique square law characteristics and having an associated natural resonance frequency (NRF);

a plurality of combs electrostatically associated with and coupled to each proof mass;

drive means coupled to the plurality of combs for supplying a drive voltage to the plurality of combs and inducing movement of each proof mass in a plane relative to the associated combs, the drive means having an associated drive motor natural resonance frequency, wherein the arrangement of the proof masses and combs defines a sense axis parallel to the plane in which the proof masses move, further wherein the combs are driven at half the associated NRF in response to the unique square law characteristics of the spring and proof mass assembly;

sensing means for sensing the movement of the proof masses when the rate sensor system is rotated about the sense axis, wherein the movement of the proof masses is defined by deflection of the proof masses relative to the combs; and

measurement means for measuring the deflection of the proof masses to determine the rotational rate.

2. The system of claim 1, wherein the drive means comprises:

a comb drive amplifier for driving the plurality of combs, and

a half-frequency motor oscillator for driving the plurality of combs at half the NRF, such that no parasitic drive voltage at the NRF is produced.

3. The system of claim 2, wherein the half-frequency motor oscillator includes a flip flop and a filter coupled in series to the flip flop to provide the drive voltage at half the natural resonance frequency.

4. A micromachined rate sensor system for sensing rotation rate, comprising:

at least one proof mass;

a plurality of combs electrostatically associated with and coupled to each proof mass;

excitation means coupled to the plurality of combs for inducing a velocity and measurable motion in each proof mass in a plane relative to the associated combs, the arrangement of the proof masses and combs defining a sense axis parallel to the plane in which the proof masses move and normal to their velocities, wherein the velocity of the proof masses relative to the plurality of combs is associated with a natural resonance frequency (NRF) at which the proof masses and the combs self-oscillate, further wherein the excitation means includes

a comb drive amplifier for driving the plurality of combs at a drive voltage, wherein a parasitic drive voltage attributable to undesirable feedthrough of the drive voltage back into the sensor system is produced when the drive voltage is at the NRF, and

a half-frequency motor oscillator for driving the plurality of combs at half the;

NRF to minimize the parasitic drive voltage;

sensing means for sensing the motion and velocity of the proof masses when the proof mass and associated comb assembly is rotated about the sense axis, wherein the velocity and motion of the proof masses are defined by deflection of the proof masses relative to the combs; and

measurement means for measuring the deflection of the proof masses to determine the rotational rate.

5. The system of claim 4, wherein the half-frequency motor oscillator includes a flip flop, and a first filter coupled in series to the flip flop to provide the drive voltage at half the NRF.

6. The system of claim 5, further comprising:

an amplifier for sensing the motion of the proof masses relative to the plurality of combs, and for translating the motion into a voltage which comprises the output of the amplifier,

a compensator coupled to the amplifier for providing a phase shift to the amplifier output;

a multiplier coupled to the compensator, the multiplier having an output,

a low pass filter coupled to the multiplier for filtering the output of the multiplier,

a gain control circuit coupled to the second low pass filter, and having an output which comprises a regulated drive signal, and

a driving amplifier which drives the plurality of combs, wherein the output of the resonator compensator is input into the sensor system to determine the rotational rate.

7. The system of claim 6, wherein the flip flop and the first filter have an output, the output being input into the gain control circuit.

8. A method of driving a micromachined gyro rate sensor having a plurality of sense plates electrostatically coupled to associated combs, wherein the sense plates and combs move relative to each other at an inherent natural resonance frequency (NRF) in response to a drive voltage, wherein the method minimizes parasitic drive voltage attributable to undesirable feedthrough of the drive voltage back to the sense plates and combs, the method comprising the steps of:

self-oscillating the sense plates and the combs at their NRF by supplying a voltage to the combs; and

driving the combs at half the NRF by superimposing an AC drive voltage via an amplifier and phase shift compensation network over the voltage supplied to the combs, such that minimal parasitic drive voltage is produced at the NRF.

9. A method for sensing rotation rate and position, comprising the steps of:

electrically excited a plurality of proof masses which are electrostatically associated with and coupled to a plurality of combs, wherein the step of electrostatically exciting includes the step of applying a drive voltage to drive the plurality of combs at half a natural resonance frequency (NRF) at which the proof masses and the combs self-oscillate such that no parasitic drive voltage at the NRF, attributable to undesirable feedthrough of the drive voltage back to the plurality of combs, is produced;

inducing movement and a velocity in each proof mass relative to the associated combs, the arrangement of the proof masses and combs defining a sense axis which is parallel to the plane in which the proof masses move and normal to their velocities;

sensing deflections in the motion of the proof masses when the proof masses relative to the associated combs are rotated about the sense axis; and

measuring the deflection of the proof masses to determine the rotational rate.

10. The method of claim 9, wherein the step of inducing a velocity in each proof mass relative to the associated combs includes self-oscillating the proof masses and associated combs at their corresponding NRF.

11. The method of claim 9, further comprising the steps of:

coupling a sense amplifier to the proof masses to determine the amount of deflection of the proof masses relative to the associated combs, the sense amplifier having an output,

coupling a compensator to the sense amplifier, such that the output of the sense amplifier is input into the compensator, and

coupling a flip flop to the compensator to cause a drive voltage to be provided to the proof masses and combs at half the NRF.

12. The method of claim 11, further comprising the steps of:

translating the deflection of the proof masses relative to the combs into a voltage,

multiplying the output of the sense amplifier,

filtering the multiplied output, and

regulating the filtered output via a gain control circuit to produce a regulated drive signal.