Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby
First Claim
Patent Images
1. A method of fabricating a switch, comprising the steps of:
- providing an insulating layer over a metal plate, said insulating layer having at least one via extending to said metal plate;
providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into said at least one via;
providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one via, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer for providing access for the removal of said sacrificial layer;
providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and
removing said sacrificial layer.
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Accused Products
Abstract
An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a portion of the insulating layer so that the metal bridge extends over the via and the opening is situated adjacent a portion of the sacrificial layer. A reinforcing seal layer with a well is provided over the metal bridge so that the well is situated adjacent to at least a portion of the opening. The sacrificial layer is then removed.
92 Citations
11 Claims
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1. A method of fabricating a switch, comprising the steps of:
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providing an insulating layer over a metal plate, said insulating layer having at least one via extending to said metal plate; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into said at least one via; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one via, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer for providing access for the removal of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating a switch, comprising the steps of:
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providing an insulating layer over a plurality of metal plates, said insulating layer having a plurality of vias, each one of said plurality of vias extending to a predetermined respective one of said metal plates; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into at least a respective one of said plurality of vias and contacts a selected one of said plurality of metal plates; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one of said plurality of vias, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer. - View Dependent Claims (8, 9, 10, 11)
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Specification