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Automated optical inspection apparatus

  • US 5,532,739 A
  • Filed: 02/15/1995
  • Issued: 07/02/1996
  • Est. Priority Date: 10/06/1993
  • Status: Expired due to Term
First Claim
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1. A machine vision apparatus for automating in-process inspection of device bonding, comprising:

  • an image processing means for generating digital image signals corresponding to an optically sensed pre-bond view of a device which is to be bonded to a supporting member,a bonding means, coupled to said image processing means, for placing a bond between said device and said supporting member,a means for activating said image processing means, coupled to said bonding means and said image processing means, for generating digital image signals corresponding to a an optically sensed post-bond view of said device located in said supporting member,a registration means, coupled to said activating means, for subtracting said post-bond view from said pre-bond view to identify a bond, andan inspection means, coupled to said registration means, for verifying said bond.

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