Megasonic cleaning system
First Claim
1. An apparatus for processing semiconductor wafers comprising:
- a tank having a wall including a portion forming a transmitter of sonic energy;
a frame mounted to an exterior surface of said tank wall;
a flexible diaphragm extending across and supported by said frame;
a transducer carrier supported on the diaphragm with the carrier having a surface held by said diaphragm adjacent to the transmitter; and
a transducer mounted to an opposite surface of said carrier.
15 Assignments
0 Petitions
Accused Products
Abstract
A transducer is bonded to a metal carrier that is mounted on an elastomeric frame-like diaphragm. The outer periphery of the diaphragm is mounted on a frame bonded to the bottom of a quartz tank. A vacuum applied to a chamber surrounding the lower portion of the carrier draws the carrier against the tank bottom with a compliant interface between the tank and the carrier. A cover clamps the diaphragm to the support and creates a coolant chamber with the diaphragm and the carrier for cooling the transducer. In other arrangements, resilient material or springs are employed to produce a force to compress the interface against the tank. Also the weight of the tank can produce compressive force on the interface.
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Citations
49 Claims
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1. An apparatus for processing semiconductor wafers comprising:
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a tank having a wall including a portion forming a transmitter of sonic energy; a frame mounted to an exterior surface of said tank wall; a flexible diaphragm extending across and supported by said frame; a transducer carrier supported on the diaphragm with the carrier having a surface held by said diaphragm adjacent to the transmitter; and a transducer mounted to an opposite surface of said carrier. - View Dependent Claims (2, 3, 4, 5, 6, 8, 9, 10)
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7. Apparatus for processing semiconductor wafers comprising:
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a quartz tank having a bottom wall including a shell having a convex surface forming an interior surface of the tank and having a concave surface forming an exterior surface of the tank; a carrier positioned beneath said shell and having a convex exterior surface positioned in close proximity to the concave surface of the shell, the carrier having a concave downwardly facing surface opposite the carrier convex surface; an arcuate transducer having a convex exterior surface which conforms to the concave surface of the carrier and is coupled to the concave surface of the carrier so that sonic energy from the transducer is transmitted to the carrier; an interface between the carrier and the shell to conform to the adjacent shell and carrier surfaces and adapted to transmit sonic energy from the carrier to the shell; a support frame bonded to an exterior surface of the tank and surrounding and spaced outwardly from portions of the carrier depending below the tank bottom wall; and an elastomeric frame-shaped diaphragm attached to a lower surface of the support frame and attached to the depending portions of the carrier to flexibly support the carrier, a chamber being formed that is bounded by an interior wall of the support frame, lower portions of the carrier and the diaphragm, the chamber being pneumatically sealed so that a vacuum may be applied to the chamber to a degree sufficient to draw the carrier upwardly to compress the interface into intimate contact between the carrier and the tank, with said diaphragm being sufficiently flexible to accommodate the upward movement of the carrier.
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11. Apparatus for processing semiconductor wafers comprising:
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a flexible diaphragm for mounting to a support, adjacent a processing tank; a transducer carrier supported on said diaphragm for flexible movement; and a transducer adapted to convert electrical energy into sonic energy, the transducer being coupled to the carrier so that the sonic energy is transmitted to the carrier. - View Dependent Claims (12, 13, 14, 15, 16)
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17. An apparatus for processing semiconductor wafers, comprising:
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a tank having a wall including a portion forming a transmitter of sonic energy; a flexibly mounted transducer carrier having a surface which conforms to and mates with said tank wall portion; a transducer coupled to a surface of said carrier opposite from said mating surface in a manner to propagate sonic energy into the carrier when the transducer is electrically energized; and an interface layer between the tank wall portion and the carrier mating surface, the interface being conformable to the tank and carrier surfaces which it engages and being capable of transmitting sonic energy from the carrier to the tank wall portion when the interface layer is compressed between the carrier and the tank wall portion, wherein said interface layer is such that the carrier can be readily withdrawn from the tank when the force compressing the interface layer is withdrawn. - View Dependent Claims (18, 21, 22, 23, 24)
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19. An apparatus for processing semiconductor wafers comprising:
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a tank having a wall including a portion forming a transmitter of sonic energy; a transducer carrier having a surface which conforms to and mates with said tank wall portion; a transducer coupled to a surface of said carrier opposite from said mating surface in a manner to propagate sonic energy into the carrier when the transducer is electrically energized; an interface layer between the tank wall portion and the carrier mating surface, the interface being conformable to the tank and carrier surfaces which it engages and being capable of transmitting sonic energy from the carrier to the tank wall portion when the interface layer is compressed between the carrier and the tank wall portion, wherein said interface layer is such that the carrier can be readily withdrawn from the tank when the force compressing the interface layer is withdrawn; and means for producing the force which compresses the interface layer between the tank and the carrier, said means including a support for the carrier that enables the carrier to be pressed against the interface layer, or a vacuum applied to a chamber formed by the support, the carrier, and portions of said tank adjacent said carrier, with said chamber being open to the interface layer, and with the chamber being constructed such that when a vacuum is applied to the chamber the vacuum produces a force drawing the carrier towards the tank portion so as to compress the interface layer. - View Dependent Claims (20)
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25. A method of transmitting sonic energy into a tank which has a wall portion adapted to efficiently transmit sonic energy comprising:
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providing a transducer carrier having a surface which mates with and conforms to an exterior of said tank wall portion; flexibly mounting the carrier adjacent said wall portion; coupling a transducer to a surface of the carrier opposite said mating surface in a manner that enables the transducer to propagate megasonic energy into the carrier when the transducer is electrically energized; positioning an interface layer between the carrier and the tank wall portion, the interface layer being adapted to conform to the mating surfaces of the tank wall portion and the carrier; and compressing the interface layer between the carrier and the tank wall portion, said interface layer being formed of material which will efficiently transmit sonic energy from the carrier to the tank wall portion when the layer is compressed between the carrier and the tank wall portion. - View Dependent Claims (28, 29)
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26. A method of transmitting sonic energy into a tank which has a wall portion adapted to efficiently transmit sonic energy comprising:
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providing a transducer carrier having a surface which mates with and conforms to an exterior of said tank wall portion; coupling a transducer to a surface of the carrier opposite said mating surface in a manner that enables the transducer to propagate megasonic energy into the carrier when the transducer is electrically energized; positioning an interface layer between the carrier and the tank wall portion, the interface layer being adapted to conform to the mating surfaces of the tank wall portion and the carrier; and compressing the interface layer between the carrier and the tank wall portion with a vacuum which produces a force urging the carrier and the tank wall portion towards each other, said interface layer being formed of material which will efficiently transmit sonic energy from the carrier to the tank wall portion when the layer is compressed between the carrier and the tank wall portion.
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27. A method of transmitting sonic energy into a tank which has a wall portion adapted to efficiently transmit sonic energy comprising:
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providing a transducer carrier having a surface which mates with and conforms to an exterior of said tank wall portion; coupling a transducer to a surface of the carrier opposite said mating surface in a manner that enables the transducer to propagate megasonic energy into the carrier when the transducer is electrically energized; positioning an interface layer between the carrier and the tank wall portion, the interface layer being adapted to conform to the mating surfaces of the tank wall portion and the carrier; and compressing said interface layer between the carrier and the tank wall portion with a resilient structure, said interface layer being formed of material which will efficiently transmit sonic energy from the carrier to the tank wall portion when the layer is compressed between the carrier and the tank wall portion.
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30. A method of transmitting sonic energy through a wall of a tank into liquid in the tank to assist in the processing of components submerged in the liquid, comprising:
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applying a vacuum to a chamber surrounding a portion of a carrier which has a portion positioned adjacent to a wall of the tank, which is a good transmitter of megasonic energy, the chamber also being formed by the tank wall surrounding the transmitter, a support frame surrounding a portion of the carrier and being attached to said tank wall, and a flexible diaphragm attached to the support frame and having a portion connected to and resiliently supporting the carrier; applying electrical energy to a transducer sonically coupled to a surface of the carrier to transmit sonic energy through the carrier to the transmitter; and maintaining the vacuum on the chamber when the sonic energy is being applied to the carrier so that the carrier continues to be drawn against the transmitter. - View Dependent Claims (31, 32)
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33. A method of making an apparatus for applying megasonic energy into a tank containing liquid for processing semiconductor substrates, the method comprising:
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providing a tank with a wall including an integral portion forming a good transmitter of sonic energy; providing a carrier having a surface conforming generally to an exterior surface of said transmitter; coupling a transducer to a surface of the carrier opposite from said conforming surface to transmit sonic energy from the transducer to the carrier; mounting the carrier to a flexible diaphragm; attaching a support frame to an exterior surface of said tank wall surrounding the area in which said transmitter is positioned, with the support frame being spaced from said transmitter; positioning the carrier adjacent the tank transmitter; attaching the diaphragm to the support frame so that the carrier is held adjacent the tank transmitter; and drawing the carrier into sonically coupled relation with the transmitter to allow sonic energy to be efficiently transmitted from the transducer through the carrier and through the transmitter into the tank. - View Dependent Claims (34, 35)
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36. An apparatus for processing semiconductor wafers comprising:
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a tank having a wall including a portion forming a transmitter of sonic energy; a transducer carrier removably mounted to said tank adjacent said tank wall portion and having a surface which conforms to and mates with said portion, wherein said carrier can be readily withdrawn from the tank when a force pressing together the carrier and the tank is withdrawn; and a piezoelectric transducer coupled to a surface of said carrier opposite from said mating surface in a manner to propagate sonic energy into the carrier when the transducer is electrically energized. - View Dependent Claims (37, 38)
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39. A method of transmitting sonic energy into a tank which has a wall portion adapted to efficiently transmit sonic energy comprising:
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providing a transducer carrier having a surface which mates with and conforms to an exterior of the tank wall portion; flexibly and removably mounting the carrier to the tank; pressing together the carrier and the tank wall portion; and coupling a piezoelectric transducer to a surface of the carrier opposite said mating surface in a manner that enables the transducer to propagate megasonic energy into the carrier when the transducer is electrically energized. - View Dependent Claims (40, 41, 42, 43)
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44. An apparatus for applying megasonic energy into a fluid for cleaning an article, comprising:
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a tank; a frame fixed to a wall of the tank without penetrating the wall; a frame cover attached to the frame; a piezoelectric transducer which converts electrical energy into megasonic energy; and a flexible support held in position by said frame and cover, and supporting said transducer in a manner to permit the transducer to be pressed into acoustically coupled relation with a portion of said tank wall outlined by said frame to propagate megasonic energy into the fluid in said tank, said frame cover and said support being readily removable from said frame to enable said transducer to be withdrawn from said tank for repair or replacement. - View Dependent Claims (45, 46, 47, 48, 49)
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Specification