Electrostatic chuck

• US 5,535,090 A
• Filed: 03/03/1994
• Issued: 07/09/1996
• Est. Priority Date: 03/03/1994
• Status: Expired due to Fees

• Current Assignee: Dr. Arthur Sherman
• Original Assignee: Dr. Arthur Sherman
• Inventors: Sherman, Arthur
• Primary Examiner(s): FLEMING, FRITZ M
• Application Number:
  US08/205,923
• Time in Patent Office: 859 Days
• Field of Search: 361/230, 361/233, 361/234, 361/235, 269/8, 269/903, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck is provided having a plurality of small electrostatic structures for holding an electrically conductive workpiece forming a plate of a capacitor. Each electrostatic structure includes a first thermally conductive single-crystal dielectric sheet, and a first electrode in sheet form sandwiched between the first dielectric sheet and a second dielectric surface. The workpiece, typically a conductive or semiconductive wafer, is juxtaposed to the first dielectric sheet of each electrostatic structure and forms a second electrode. The second dielectric sheet, if thick, is used as a thermally conducting base plate which can be attached to a low pressure reactor. If the second dielectric is a thin sheet, then it is mounted to a thermally conductive metal base plate through which heat can be controllably conducted. The resultant electrostatic structure may optionally be brazed to the metal base plate if the thermal expansion characteristics of the two elements are sufficiently matched. The first thermally conductive dielectric sheet is preferably formed of sapphire (Al₂ O₃), which is sufficiently thermally conductive to allow for rapid heat transfer between the base plate and the workpiece. The first electrodes of different electrostatic structures are held at different electrical potentials (typically of several thousand volts difference) and a charge is maintained by this potential difference between selected electrostatic structures.

Claims

1. An electrostatic chuck for holding an electrically conductive workpiece in a low pressure reactor, the chuck, comprising:

a thermally-conductive base plate;

a plurality of electrostatic structures disposed over the base plate, each electrostatic structure including;

a first dielectric,

an electrically conductive electrode forming a first capacitor plate in contact with the first dielectric, and

a second dielectric in contact with the electrode, and

a dielectric separator between the first and the second dielectrics and surrounding the electrode, wherein the electrically conductive workpiece forms a second capacitor plate and can be held against the first dielectric of at least one of the electrostatic structures under application of an electrical potential across the first and second capacitor plates.

2. The electrostatic chuck of claim 1 wherein the base plate is metal with a smooth sealing surface.

3. The electrostatic chuck of claim 1, wherein the first and second dielectric and the dielectric separator are formed of segments of sapphire sheets.

4. The electrostatic chuck of claim 1, wherein the first electrode is niobium.

5. The electrostatic chuck of claim 1, wherein the first and second dielectric and the dielectric separator are formed of single crystal material.

6. The electrostatic chuck of claim 1, wherein the first electrode is formed of a metal that has a thermal expansion coefficient similar to that of the first and second dielectrics.

7. The electrostatic chuck of claim 1, wherein the first dielectric, the first electrode, and the second dielectric are brazed together.

8. The electrostatic chuck of claim 1, wherein the first dielectric, the first electrode, and the second dielectric are attached with platinum paste fired in air.

9. The electrostatic chuck of claim 1, wherein adjacent contacting surfaces of the first dielectric, the second dielectric and the dielectric separator are joined by growing additional dielectric material on the contacting surfaces by means of chemical vapor deposition.

10. The electrostatic chuck of claim 1, further comprising vacuum tight electrical connector feedthroughs in the reactor to apply different electrical potentials to the electrodes of each of the electrostatic structures.

11. The electrostatic chuck of claim 1, wherein the dielectric structures are brazed directly to the thermally-conductive base plate, eliminating the need for vacuum tight electrical connector feedthroughs.

12. The electrostatic chuck of claim 1, wherein the electrostatic structures are used to allow the workpiece to be held in a vacuum environment, thereby allowing the workpiece to be moved rapidly and securely.

13. The electrostatic chuck of claim 1, wherein the base plate is a dielectric material with a smooth sealing surface.

15. The electrostatic chuck of claim 1 or 9, wherein adjacent contacting surfaces of the second dielectric and the thermally-conductive base plate are joined together by growing dielectric material on the contacting surfaces by means of chemical vapor deposition.

14. An electrostatic chuck for holding an electrically conductive workpiece in a low pressure reactor, comprising:

a dielectric base;

a plurality of electrostatic structures disposed over the dielectric base, each electrostatic structure, including;

a first dielectric,

an electrically conductive electrode, forming a first capacitor plate, in contact with the first dielectric and bonded to the dielectric base, wherein the contacting surfaces of the first dielectric and the dielectric base are joined by growing additional dielectric material on the contacting surfaces by chemical vapor deposition, and

an electrical connector for applying a different electrical potential to the electrode of at least one of the electrostatic structures, wherein the workpiece forms a second capacitor plate and is held against the first dielectric of each electrostatic structure under application of the different electrical potential.