Method of making electrostatic chuck with oxide insulator

• US 5,535,507 A
• Filed: 12/20/1993
• Issued: 07/16/1996
• Est. Priority Date: 12/20/1993
• Status: Expired due to Term

• Current Assignee: FM Industries Inc. (NGK Insulators Limited)
• Original Assignee: International Business Machines Corporation
• Inventors: Keller, John H., Barnes, Michael S., Westerfield, Robert P. Jr., Tompkins, Robert E., Logan, Joseph S., Ruckel, Raymond R.
• Primary Examiner(s): Arbes, Carl J.
• Application Number:
  US08/169,911
• Time in Patent Office: 939 Days
• Field of Search: 29/825, 29/829, 156/345
• US Class Current: 29/825
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

An electrostatic chuck is made by a method in which the component parts are machined, then anodized to provide a hard insulating surface, and then assembled in a fixture, to provide a planar surface for wafer support that retains superior insulating properties; gas may be fed from the rim only, diffusing within interstices between the clamping surface and the wafer and maintaining a desired pressure by flowing radially through an impedance determined by the average spacing between clamping surface and wafer, thereby providing uniform pressure across the clamping surface without the use of elastomeric seals.

Claims

1. A method of manufacturing an electrostatic chuck for holding a workpiece by electrostatic attraction comprising the steps of:

machining a base electrode from an aluminum alloy, said base electrode having an electrode recess machined in a top surface thereof for receiving a second electrode, said recess having inner and outer recess side surfaces connected to said top surface by transition regions having a first radius of curvature and a recess bottom surface at a recess depth below said top surface and connected to said recess side surfaces by second transition regions having a second radius of curvature, thereby defining a recess transverse distance;

machining said second electrode to match said recess with a second transverse distance related to said recess transverse distance and a second thickness related to said recess depth;

after said steps of machining said base and second electrodes, oxidizing both said base electrode and said second electrode with an electrode thickness of aluminum oxide, so that said base electrode has an oxidized recess with an oxidized recess transverse distance and an oxidized recess depth and said second electrode has an oxidized second transverse distance and an oxidized second thickness, said thickness of aluminum oxide, said recess transverse distance and said second transverse distance being related such that inner and outer recess gaps are present between said base electrode and said second electrode when said base and second electrodes are assembled;

coating at least one of said recess side surfaces and said second electrode side surfaces with a bonding agent;

after said step of oxidizing said base and second electrodes, assembling said base and second electrodes and forcing said base and second electrode top surfaces against corresponding reference base and second electrode surfaces of a reference fixture, said second electrode surface of said reference fixture being positioned with respect to said base surface of said reference fixture by an offset amount such that said top surface of said second electrode extends past said top surface of said base electrode by a shrinkage amount and such that said top surface of said second electrode is positioned with respect to said top surface of said base electrode by said shrinkage amount, whereby said bonding agent shrinks to retract said top surface of said second electrode to a final position below said top surface of said base electrode.

2. A method according to claim 1, in which said step of machining said base and second electrodes includes machining at least one azimuthal gas distribution groove in a top surface of at least one of said base and second electrodes without a radial gas distribution groove, whereby there is no low-impedance radial path for gas flow along said clamping surface.

3. A method according to claim 2, further including a step of separating said second electrode from said base electrode by a decoupling insulator having a decoupling thickness sufficient to reduce RF power capacitively coupled between said base and second electrodes below a threshold amount.

4. A method according to claim 1, further including a step of separating said second electrode from said base electrode by a decoupling insulator having a decoupling thickness sufficient to reduce RF power capacitively coupled between said base and second electrodes below a threshold amount.

5. A method of manufacturing an electrostatic chuck for holding a workpiece by electrostatic attraction comprising the steps of:

machining a base electrode from an aluminum alloy, said base electrode having an electrode recess machined in a top surface thereof for receiving a second electrode, said recess having inner and outer recess side surfaces connected to said top surface by transition regions having a first radius of curvature and a recess bottom surface at a recess depth below said top surface and connected to said recess side surfaces by second transition regions having a second radius of curvature, thereby defining a recess transverse distance;

machining said second electrode to match said recess with a second transverse distance related to said recess transverse distance and a second thickness related to said recess depth;

after said steps of machining said base and second electrodes, oxidizing both said base electrode and said second electrode with an electrode thickness of aluminum oxide, so that said base electrode has an oxidized recess with an oxidized recess transverse distance and an oxidized recess depth and said second electrode has an oxidized second transverse distance and an oxidized second thickness, said thickness of aluminum oxide, said recess transverse distance and said second transverse distance being related such that inner and outer recess gaps are present between said base electrode and said second electrode when said base and second electrodes are assembled;

coating at least one of said recess side surfaces and said second electrode side surfaces with a bonding agent;

after said step of oxidizing said base and second electrodes, assembling said base and second electrodes with a strip of organic insulating film therebetween in said inner and outer recess gaps, so that said bonding agent bonds said insulating film to both said base and second electrodes and forcing said base and second electrode top surfaces against corresponding reference base and second electrode surfaces of a reference fixture, said second electrode surface of said reference fixture being positioned with respect to said base surface of said reference fixture such that said top surface of said second electrode is positioned with respect to said top surface of said base electrode by a shrinkage amount, whereby said bonding agent shrinks to retract said top surface of said second electrode to a final position below said top surface of said base electrode.

6. A method according to claim 5, further including a step of separating said second electrode from said base electrode by a decoupling insulator having a decoupling thickness sufficient to reduce RF power capacitively coupled between said base and second electrodes below a threshold amount.

7. A method of manufacturing an electrostatic chuck for holding a workpiece by electrostatic attraction comprising the steps of:

machining a base electrode from an aluminum alloy, said base electrode having an electrode recess machined in a top surface thereof for receiving a second electrode, said recess having inner and outer recess side surfaces connected to said top surface by transition regions having a first radius of curvature and a recess bottom surface at a recess depth below said top surface and connected to said recess side surfaces by second transition regions having a second radius of curvature, thereby defining a recess transverse distance;

machining said second electrode to match said recess with a second transverse distance related to said recess transverse distance and a second thickness related to said recess depth;

oxidizing both said base electrode and said second electrode with an electrode thickness of aluminum oxide, so that said base electrode has an oxidized recess with an oxidized recess transverse distance and an oxidized recess depth and said second electrode has an oxidized second transverse distance and an oxidized second thickness, said thickness of aluminum oxide, said recess transverse distance and said second transverse distance being related such that inner and outer recess gaps are present between said base electrode and said second electrode when said base and second electrodes are assembled;

coating at least one of said recess side surfaces and said second electrode side surfaces with a bonding agent;

assembling said base and second electrodes and forcing said base and second electrode top surfaces against corresponding reference base and second electrode surfaces of a reference fixture;

in which said step of machining said base and second electrodes includes machining at least one azimuthal gas distribution groove in a top surface of at least one of said base and second electrodes without a radial gas distribution groove, whereby there is no low-impedance radial path for gas flow along said clamping surface.

8. A method according to claim 7, further including a step of separating said second electrode from said base electrode by a decoupling insulator having a decoupling thickness sufficient to reduce RF power capacitively coupled between said base and second electrodes below a threshold amount.