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Gimballed vibrating wheel gyroscope

  • US 5,535,902 A
  • Filed: 05/22/1995
  • Issued: 07/16/1996
  • Est. Priority Date: 02/10/1993
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a micromechanical device comprising the steps of:

  • providing a first silicon layer;

    providing a second silicon layer over said first silicon layer to provide a device layer;

    processing a first surface of said device layer;

    depositing an oxide layer over said processed device layer;

    selectively etching said oxide layer to provide an aperture therethrough;

    depositing a layer of polysilicon over said oxide layer to form electrodes adjacent to said aperture;

    depositing a layer of electrically insulating material over said oxide layer;

    depositing a layer of polysilicon over said layer of electrically insulating material;

    removing said first silicon layer;

    processing a second surface of said device layer; and

    removing portions of said oxide layer to provide a cantilevered device layer.

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