High-current, low-pressure plasma-cathode electron gun
First Claim
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1. A plasma-cathode electrode gun for extracting an electron beam from an ionizable gas having a pressure less than 5×
- 10-4 Torr, comprising;
an enclosure having a wall and and configured to contain said ionizable gas;
a thermionic electron emitter positioned within said enclosure;
an outlet defined in said wall;
a discharge anode defining a plurality of apertures and positioned across said outlet;
a beam anode defining a plurality of apertures and spaced from said discharge anode to define an acceleration region between said discharge anode and said beam anode;
a magnet system that is arranged around said enclosure and configured to generate magnetic flux line in said enclosure which are adjacent said wall;
a discharge supply arranged to apply discharge voltage pulses across said emitter and said discharge anode to generate a plasma of ions and electrons by ionization of said ionizable gas;
a beam supply coupled to said discharge anode and said beam anode to generate an electric field across said acceleration region for extraction of a first portion of said electrons as said electron beam; and
a voltage differential device that connects said wall and said discharge anode for coupling a sample of said discharge voltage pulses to said wall to direct a second portion of said electrons through said magnetic flux lines for enhancement of said ionization and said extraction.
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Abstract
Plasma-cathode electron gun structures capable of operation in low-pressure, e.g., <5×10-3 Torr, ionizable gas environments are disclosed. They utilize a thermionic emitter within an enclosure with a partially transparent electrode defining a plasma face. Spaced anodes are disposed adjacent the electrode to extract an electron beam from the plasma face. A magnetic system forms an inward directed field, and a portion of the plasma electrons are directed through this field to enhance ionization efficiency.
81 Citations
5 Claims
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1. A plasma-cathode electrode gun for extracting an electron beam from an ionizable gas having a pressure less than 5×
- 10-4 Torr, comprising;
an enclosure having a wall and and configured to contain said ionizable gas; a thermionic electron emitter positioned within said enclosure; an outlet defined in said wall; a discharge anode defining a plurality of apertures and positioned across said outlet; a beam anode defining a plurality of apertures and spaced from said discharge anode to define an acceleration region between said discharge anode and said beam anode; a magnet system that is arranged around said enclosure and configured to generate magnetic flux line in said enclosure which are adjacent said wall; a discharge supply arranged to apply discharge voltage pulses across said emitter and said discharge anode to generate a plasma of ions and electrons by ionization of said ionizable gas; a beam supply coupled to said discharge anode and said beam anode to generate an electric field across said acceleration region for extraction of a first portion of said electrons as said electron beam; and a voltage differential device that connects said wall and said discharge anode for coupling a sample of said discharge voltage pulses to said wall to direct a second portion of said electrons through said magnetic flux lines for enhancement of said ionization and said extraction. - View Dependent Claims (2, 3, 4)
- 10-4 Torr, comprising;
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5. A method of extracting an electron beam from an ionizable gas having a pressure less than 5×
- 10-4 Torr, the method comprising the steps of;
containing said ionizable gas within an enclosure; emitting electrodes from a thermionic emitter into said ionizable gas; impression discharge voltage pulse across said ionizable gas to form a plasma of ions and electrons by ionization of said gas; with a magnetic flux source, forming magnetic flux lines within said enclosure; applying an electric field to said ionizable gas to extract a first portion of said electrons and form said electron beam; and coupling a selectable sample of said discharge voltage pulse to said enclosure to direct to a second portion of said electrons through said magnetic flux lines for enhancement of said ionization and said extraction.
- 10-4 Torr, the method comprising the steps of;
Specification