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Microelectromechanical signal processors

  • US 5,537,083 A
  • Filed: 08/30/1994
  • Issued: 07/16/1996
  • Est. Priority Date: 12/11/1992
  • Status: Expired due to Term
First Claim
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1. A micromechanical signal processor comprising:

  • a substrate;

    a first rigid mass;

    a first flexible structure mechanically connecting said first mass to said substrate and allowing said first mass to move relative to said substrate;

    a second rigid mass; and

    a second flexible structure mechanically movably connecting said second mass to said first mass, said second flexible structure allowing said second rigid mass to move relative to said first rigid mass, whereby said first and second rigid masses are mechanically coupled but able to move independently.

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